基底对锡和铬薄膜电气性能影响的比较研究

IF 0.6 4区 物理与天体物理 Q4 PHYSICS, APPLIED Low Temperature Physics Pub Date : 2024-01-11 DOI:10.1063/10.0023890
S. Udachan, S. B. Kolavekar, N. H. Ayachit, L. A. Udachan, S. Siddanna, S. S. Kolkundi, K. Naveen Kumar
{"title":"基底对锡和铬薄膜电气性能影响的比较研究","authors":"S. Udachan, S. B. Kolavekar, N. H. Ayachit, L. A. Udachan, S. Siddanna, S. S. Kolkundi, K. Naveen Kumar","doi":"10.1063/10.0023890","DOIUrl":null,"url":null,"abstract":"In thin film technology, substrate materials happen to be one of the deposition parameters that determine the physical properties of films. Hence, soda-lime glass and quartz continue to be the widely utilized substrate materials because of their high-frequency performance, price, and surface quality. For certain applications, various substrate materials that provide an acceptable compromise for the work at hand are required. Soda-lime glass and quartz have been chosen as the substrates for the tin and chromium thin films that will be produced via thermal evaporation in a vacuum. A comparative study on the electrical properties of chromium films was made in the light of Fuchs–Sondheimer and Mayadas–Shatzkes theories. Numerous physical properties, including resistivity of infinitely thick film, sticking coefficient, conduction electron mean free, etc., may be determined from resistivity-thickness data.","PeriodicalId":18077,"journal":{"name":"Low Temperature Physics","volume":"6 1","pages":""},"PeriodicalIF":0.6000,"publicationDate":"2024-01-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Comparative study on the effect of substrates on electrical properties of tin and chromium thin films\",\"authors\":\"S. Udachan, S. B. Kolavekar, N. H. Ayachit, L. A. Udachan, S. Siddanna, S. S. Kolkundi, K. Naveen Kumar\",\"doi\":\"10.1063/10.0023890\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In thin film technology, substrate materials happen to be one of the deposition parameters that determine the physical properties of films. Hence, soda-lime glass and quartz continue to be the widely utilized substrate materials because of their high-frequency performance, price, and surface quality. For certain applications, various substrate materials that provide an acceptable compromise for the work at hand are required. Soda-lime glass and quartz have been chosen as the substrates for the tin and chromium thin films that will be produced via thermal evaporation in a vacuum. A comparative study on the electrical properties of chromium films was made in the light of Fuchs–Sondheimer and Mayadas–Shatzkes theories. Numerous physical properties, including resistivity of infinitely thick film, sticking coefficient, conduction electron mean free, etc., may be determined from resistivity-thickness data.\",\"PeriodicalId\":18077,\"journal\":{\"name\":\"Low Temperature Physics\",\"volume\":\"6 1\",\"pages\":\"\"},\"PeriodicalIF\":0.6000,\"publicationDate\":\"2024-01-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Low Temperature Physics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1063/10.0023890\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, APPLIED\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Low Temperature Physics","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1063/10.0023890","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}
引用次数: 0

摘要

在薄膜技术中,基底材料是决定薄膜物理特性的沉积参数之一。因此,钠钙玻璃和石英因其高频性能、价格和表面质量,仍然是广泛使用的基底材料。在某些应用中,需要各种基底材料为手头的工作提供可接受的折衷方案。钠钙玻璃和石英被选为锡和铬薄膜的基底材料,这些薄膜将在真空中通过热蒸发法生产。根据 Fuchs-Sondheimer 和 Mayadas-Shatzkes 理论,对铬薄膜的电特性进行了比较研究。许多物理特性,包括无限厚薄膜的电阻率、粘滞系数、传导电子平均自由度等,都可以从电阻率-厚度数据中确定。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Comparative study on the effect of substrates on electrical properties of tin and chromium thin films
In thin film technology, substrate materials happen to be one of the deposition parameters that determine the physical properties of films. Hence, soda-lime glass and quartz continue to be the widely utilized substrate materials because of their high-frequency performance, price, and surface quality. For certain applications, various substrate materials that provide an acceptable compromise for the work at hand are required. Soda-lime glass and quartz have been chosen as the substrates for the tin and chromium thin films that will be produced via thermal evaporation in a vacuum. A comparative study on the electrical properties of chromium films was made in the light of Fuchs–Sondheimer and Mayadas–Shatzkes theories. Numerous physical properties, including resistivity of infinitely thick film, sticking coefficient, conduction electron mean free, etc., may be determined from resistivity-thickness data.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
Low Temperature Physics
Low Temperature Physics 物理-物理:应用
CiteScore
1.20
自引率
25.00%
发文量
138
审稿时长
3 months
期刊介绍: Guided by an international editorial board, Low Temperature Physics (LTP) communicates the results of important experimental and theoretical studies conducted at low temperatures. LTP offers key work in such areas as superconductivity, magnetism, lattice dynamics, quantum liquids and crystals, cryocrystals, low-dimensional and disordered systems, electronic properties of normal metals and alloys, and critical phenomena. The journal publishes original articles on new experimental and theoretical results as well as review articles, brief communications, memoirs, and biographies. Low Temperature Physics, a translation of the copyrighted Journal FIZIKA NIZKIKH TEMPERATUR, is a monthly journal containing English reports of current research in the field of the low temperature physics. The translation began with the 1975 issues. One volume is published annually beginning with the January issues.
期刊最新文献
Revisiting structural, vibrational, and photochemical data of matrix-isolated simple hydantoins — Common features and substituent effects Conformers of valeric acid: Matrix isolation infrared spectroscopy study Helium 1s photoemission and photon stimulated desorption of He+ ions by double excitations from adsorbed helium layers: Zero-point motion and matrix effects Characterization of H–π and CH–O structures of the 1:1 methanol-benzene complex using matrix isolation infrared spectroscopy Linearly polarized luminescence of polyyne molecules aligned in PVA films
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1