从用于大功率和高频率电子设备的宽带隙半导体到超宽带隙半导体

Kelly Woo, Zhengliang Bian, Maliha Noshin, Rafael Perez Martinez, M. Malakoutian, B. Shankar, Srabanti Chowdhury
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引用次数: 0

摘要

宽带隙和超宽带隙(U/WBG)材料因其巨大的带隙特性而具有提高器件性能的潜力,因而备受半导体器件界的关注。这些特殊的材料特性可以使器件更加坚固耐用、效率更高,尤其是在涉及高功率、高频率和极端环境条件的情况下。尽管前景看好,但人们对 UWBG 材料的物理特性仍然了解不足,导致理论预测与实验器件行为之间存在明显差距。为了弥补这一知识差距,并指出进一步研究可产生最重要影响的领域,本综述概述了 U/WBG 材料方面的进展和局限。综述首先讨论了氮化镓,这是一种较为成熟的 WBG 材料,是建立基本概念和应对相关挑战的基础。随后,重点转向研究各种 UWBG 材料,包括 AlGaN/AlN、金刚石和 Ga2O3。对于每种材料,综述都深入探讨了它们的独特性质、生长方法和当前最先进的器件,并重点介绍了它们在功率和射频电子器件中的应用。
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From Wide to Ultrawide-Bandgap Semiconductors for High Power and High Frequency Electronic Devices
Wide and ultrawide-bandgap (U/WBG) materials have garnered significant attention within the semiconductor device community due to their potential to enhance device performance through their substantial bandgap properties. These exceptional material characteristics can enable more robust and efficient devices, particularly in scenarios involving high power, high frequency, and extreme environmental conditions. Despite the promising outlook, the physics of UWBG materials remains inadequately understood, leading to a notable gap between theoretical predictions and experimental device behavior. To address this knowledge gap and pinpoint areas where further research can have the most significant impact, this review provides an overview of the progress and limitations in U/WBG materials. The review commences by discussing Gallium Nitride, a more mature WBG material that serves as a foundation for establishing fundamental concepts and addressing associated challenges. Subsequently, the focus shifts to the examination of various UWBG materials, including AlGaN/AlN, Diamond, and Ga2O3. For each of these materials, the review delves into their unique properties, growth methods, and current state-of-the-art devices, with a primary emphasis on their applications in power and radio-frequency electronics.
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