利用分光光度法和原子力显微镜成像研究超薄银层和金层

IF 1.9 4区物理与天体物理 Q3 OPTICS Journal of the European Optical Society-Rapid Publications Pub Date : 2024-02-12 DOI:10.1051/jeos/2024005

R. Shurvinton

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引用次数: 0

摘要

演示了一种分光光度法，用于测定薄膜和超薄金属膜的折射率和厚度。该方法采用三层叠加法，将相关金属层沉积在涂有二氧化硅的不透明硅晶片上。这种堆叠会在反射光谱中产生振荡，而这种振荡对金属膜的折射率非常敏感，因此可以精确测定 1 纳米以下金属层的折射率。实验给出了银和金在 370-835 纳米波长范围内的折射率值。这些结果与薄膜的原子力显微镜（AFM）图像相关联，显示了不同厚度薄膜层结构的巨大变化。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Investigating Ultra-thin Ag and Au Layers Using Spectrophotometry and AFM Imaging

A spectrophotometric method is demonstrated for refractive index and thickness determination of thin and ultrathin metallic films. The method involves a three-layer stack where the metallic layer of interest is deposited on an opaque Si wafer coated with SiO2. This stack creates oscillations in the reflectance spectrum, which are highly sensitive to the index of the metallic film, allowing precise determination of the index of layers down to 1nm. Experimental index values are given for Ag and Au over the wavelength range of 370-835nm. These results are correlated with AFM images of the films, which reveal dramatic changes in structure for layers of different thickness.

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来源期刊

Journal of the European Optical Society-Rapid Publications 物理-光学

CiteScore

2.40

自引率

0.00%

发文量

审稿时长

5 weeks

期刊介绍： Rapid progress in optics and photonics has broadened its application enormously into many branches, including information and communication technology, security, sensing, bio- and medical sciences, healthcare and chemistry. Recent achievements in other sciences have allowed continual discovery of new natural mysteries and formulation of challenging goals for optics that require further development of modern concepts and running fundamental research. The Journal of the European Optical Society – Rapid Publications (JEOS:RP) aims to tackle all of the aforementioned points in the form of prompt, scientific, high-quality communications that report on the latest findings. It presents emerging technologies and outlining strategic goals in optics and photonics. The journal covers both fundamental and applied topics, including but not limited to: Classical and quantum optics Light/matter interaction Optical communication Micro- and nanooptics Nonlinear optical phenomena Optical materials Optical metrology Optical spectroscopy Colour research Nano and metamaterials Modern photonics technology Optical engineering, design and instrumentation Optical applications in bio-physics and medicine Interdisciplinary fields using photonics, such as in energy, climate change and cultural heritage The journal aims to provide readers with recent and important achievements in optics/photonics and, as its name suggests, it strives for the shortest possible publication time.