{"title":"用于离子束处理的高分辨率四极杆质谱仪","authors":"J. Blahins, A. Bzhishkian","doi":"10.2478/lpts-2024-0001","DOIUrl":null,"url":null,"abstract":"\n The mass filtering equipment in the ion beam processing industry plays a vital role. Mass filtering is usually achieved through classic magnetic mass selector techniques. The drawbacks of these techniques are the dimensions, weight, price, and power consumption. We suggest mitigating it by using the electrostatic RF mass selector instead of the magnetic one. We discuss the development of a novel ion beam processing apparatus that employs a QMS filter in a vacuum of superior purity. We describe the experimental setup in terms of part design. The article presents the successful test results of that parts. The article also explains in detail the basic principles and the technical realization of the whole apparatus and presents experimental data showing its high capabilities.","PeriodicalId":43603,"journal":{"name":"Latvian Journal of Physics and Technical Sciences","volume":null,"pages":null},"PeriodicalIF":0.5000,"publicationDate":"2024-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"High Resolution Quadrupole Mass Spectrometer for Ion Beam Processing\",\"authors\":\"J. Blahins, A. Bzhishkian\",\"doi\":\"10.2478/lpts-2024-0001\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n The mass filtering equipment in the ion beam processing industry plays a vital role. Mass filtering is usually achieved through classic magnetic mass selector techniques. The drawbacks of these techniques are the dimensions, weight, price, and power consumption. We suggest mitigating it by using the electrostatic RF mass selector instead of the magnetic one. We discuss the development of a novel ion beam processing apparatus that employs a QMS filter in a vacuum of superior purity. We describe the experimental setup in terms of part design. The article presents the successful test results of that parts. The article also explains in detail the basic principles and the technical realization of the whole apparatus and presents experimental data showing its high capabilities.\",\"PeriodicalId\":43603,\"journal\":{\"name\":\"Latvian Journal of Physics and Technical Sciences\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.5000,\"publicationDate\":\"2024-02-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Latvian Journal of Physics and Technical Sciences\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.2478/lpts-2024-0001\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, APPLIED\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Latvian Journal of Physics and Technical Sciences","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2478/lpts-2024-0001","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}
High Resolution Quadrupole Mass Spectrometer for Ion Beam Processing
The mass filtering equipment in the ion beam processing industry plays a vital role. Mass filtering is usually achieved through classic magnetic mass selector techniques. The drawbacks of these techniques are the dimensions, weight, price, and power consumption. We suggest mitigating it by using the electrostatic RF mass selector instead of the magnetic one. We discuss the development of a novel ion beam processing apparatus that employs a QMS filter in a vacuum of superior purity. We describe the experimental setup in terms of part design. The article presents the successful test results of that parts. The article also explains in detail the basic principles and the technical realization of the whole apparatus and presents experimental data showing its high capabilities.
期刊介绍:
Latvian Journal of Physics and Technical Sciences (Latvijas Fizikas un Tehnisko Zinātņu Žurnāls) publishes experimental and theoretical papers containing results not published previously and review articles. Its scope includes Energy and Power, Energy Engineering, Energy Policy and Economics, Physical Sciences, Physics and Applied Physics in Engineering, Astronomy and Spectroscopy.