{"title":"通过阳极氧化实现核壳纳米结构的电化学钽表面结构:利用磁控溅射沉积 Zn-ZnO 纳米粒子的优化和表征","authors":"Levent Kara, S. Calderon, S. Carvalho","doi":"10.1116/6.0003266","DOIUrl":null,"url":null,"abstract":"This study explores the electrochemical anodization of tantalum surfaces to create nanostructured substrates for the deposition of Zn-ZnO nanoparticles (NPs) through magnetron sputtering. The anodization process, conducted at different potentials (25 V and 50 V), resulted in tantalum surfaces with distinct dimple structures. The formation of these nano-level dimples is attributed to the dynamic equilibrium between the continuous formation and dissolution of the anodic TaOx layer. The dimple diameter is observed to increase with applied potential, correlating with the dissolution rate of the anodic oxide. The NP deposition parameters were studied in two steps. First, the effect of the deposition conditions on the nanoparticle size and distribution was evaluated and optimized on silicon substrates. Second, the conditions that resulted in the optimum size and distribution of the nanoparticles were utilized in tantalum substrates and evaluated to which extent these conditions were reproduced onto the anodized Ta substrate. Comparisons of Zn-ZnO nanoparticle depositions on silicon and tantalum substrates reveal similar island growth trends, with differences in nanoparticle size and distribution attributed to substrate properties. Further investigation involves anodized tantalum substrates with varying dimple sizes, and deposition conditions are adjusted with bias voltage, pressure, and deposition time to control nanoparticle characteristics. Characterization of the Zn-ZnO nanoparticles deposited on anodized tantalum surfaces is performed using scanning electron microscopy, high-angle annular dark-field scanning transmission electron microscopy, and energy-dispersive x-ray spectroscopy. The resulting core-shell structures are confirmed through structural analysis, revealing a core of hexagonal close-packed Zn and a shell of ZnO. The study demonstrates the influence of substrate properties and deposition conditions on the morphology and composition of Zn-ZnO nanoparticles, providing insights for applications in nanoelectronics and catalysis.","PeriodicalId":170900,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"80 9","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Electrochemically structured tantalum surfaces via anodization for core-shell nanostructures: Optimization and characterization of Zn-ZnO nanoparticle deposition using magnetron sputtering\",\"authors\":\"Levent Kara, S. Calderon, S. 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Second, the conditions that resulted in the optimum size and distribution of the nanoparticles were utilized in tantalum substrates and evaluated to which extent these conditions were reproduced onto the anodized Ta substrate. Comparisons of Zn-ZnO nanoparticle depositions on silicon and tantalum substrates reveal similar island growth trends, with differences in nanoparticle size and distribution attributed to substrate properties. Further investigation involves anodized tantalum substrates with varying dimple sizes, and deposition conditions are adjusted with bias voltage, pressure, and deposition time to control nanoparticle characteristics. Characterization of the Zn-ZnO nanoparticles deposited on anodized tantalum surfaces is performed using scanning electron microscopy, high-angle annular dark-field scanning transmission electron microscopy, and energy-dispersive x-ray spectroscopy. The resulting core-shell structures are confirmed through structural analysis, revealing a core of hexagonal close-packed Zn and a shell of ZnO. 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引用次数: 0
摘要
本研究探讨了对钽表面进行电化学阳极氧化处理,以创建纳米结构基底,从而通过磁控溅射沉积 Zn-ZnO 纳米粒子 (NPs)。在不同的电位(25 V 和 50 V)下进行的阳极氧化过程使钽表面形成了明显的凹陷结构。这些纳米级凹陷的形成归因于阳极 TaOx 层的持续形成和溶解之间的动态平衡。据观察,酒窝直径随施加电位的增加而增大,这与阳极氧化物的溶解速率有关。对 NP 沉积参数的研究分为两个步骤。首先,在硅基底上评估并优化了沉积条件对纳米粒子尺寸和分布的影响。其次,在钽基底上使用了能使纳米粒子达到最佳尺寸和分布的条件,并评估了这些条件在阳极氧化钽基底上的再现程度。对硅基底和钽基底上的氧化锌纳米粒子沉积进行比较后发现,纳米岛的生长趋势相似,纳米粒子尺寸和分布的差异归因于基底特性。进一步的研究涉及具有不同凹痕尺寸的阳极氧化钽基底,并通过调整偏置电压、压力和沉积时间来控制纳米粒子的特性。使用扫描电子显微镜、高角度环形暗场扫描透射电子显微镜和能量色散 X 射线光谱对沉积在阳极氧化钽表面的 Zn-ZnO 纳米粒子进行了表征。通过结构分析确认了由此产生的核壳结构,揭示了六方紧密堆积的锌核和氧化锌壳。该研究证明了基底特性和沉积条件对 Zn-ZnO 纳米粒子形态和组成的影响,为纳米电子学和催化应用提供了启示。
Electrochemically structured tantalum surfaces via anodization for core-shell nanostructures: Optimization and characterization of Zn-ZnO nanoparticle deposition using magnetron sputtering
This study explores the electrochemical anodization of tantalum surfaces to create nanostructured substrates for the deposition of Zn-ZnO nanoparticles (NPs) through magnetron sputtering. The anodization process, conducted at different potentials (25 V and 50 V), resulted in tantalum surfaces with distinct dimple structures. The formation of these nano-level dimples is attributed to the dynamic equilibrium between the continuous formation and dissolution of the anodic TaOx layer. The dimple diameter is observed to increase with applied potential, correlating with the dissolution rate of the anodic oxide. The NP deposition parameters were studied in two steps. First, the effect of the deposition conditions on the nanoparticle size and distribution was evaluated and optimized on silicon substrates. Second, the conditions that resulted in the optimum size and distribution of the nanoparticles were utilized in tantalum substrates and evaluated to which extent these conditions were reproduced onto the anodized Ta substrate. Comparisons of Zn-ZnO nanoparticle depositions on silicon and tantalum substrates reveal similar island growth trends, with differences in nanoparticle size and distribution attributed to substrate properties. Further investigation involves anodized tantalum substrates with varying dimple sizes, and deposition conditions are adjusted with bias voltage, pressure, and deposition time to control nanoparticle characteristics. Characterization of the Zn-ZnO nanoparticles deposited on anodized tantalum surfaces is performed using scanning electron microscopy, high-angle annular dark-field scanning transmission electron microscopy, and energy-dispersive x-ray spectroscopy. The resulting core-shell structures are confirmed through structural analysis, revealing a core of hexagonal close-packed Zn and a shell of ZnO. The study demonstrates the influence of substrate properties and deposition conditions on the morphology and composition of Zn-ZnO nanoparticles, providing insights for applications in nanoelectronics and catalysis.