High-Efficiency Polishing of Polymer Surface Using Catalyst-Referred Etching

Previously, we developed an abrasive-free polishing technique called catalyst-referred etching (CARE) for inorganic materials. In this method, the topmost site of the workpiece surface is preferentially removed via an indirect hydrolysis reaction promoted by a metal catalyst. In this study, we proposed applying the CARE method to polymer material polishing and demonstrated the polishing characteristics. Using the CARE method, polycarbonate, which has an easy cleavage of ester bond via hydrolysis, was polished, resulting in the smoothness of the surface roughness below 1.0 nm. Based on the surface observations, the removal mechanism was estimated as follows. Molecule chains are entangled to form clusters constituting the polymer surface and help determine the surface roughness. In the CARE method, the top of this cluster was selectively removed, thus creating a smooth surface. Polymers with C–C bonds, such as polymethyl methacrylate and fluorinated ethylene propylene, were also smoothed using the CARE method. These results indicate that the CARE method is highly effective in polishing polymer materials.