在晶圆级硅基 InP-on-Si (100) 异质衬底上生长的大功率、电驱动连续波 1.55μm 硅基多量子阱激光器,具有宽工作温度范围。

IF 19.4 1区 物理与天体物理 Q1 Physics and Astronomy Light, science & applications Pub Date : 2024-03-11 DOI:10.1038/s41377-024-01389-2
Jialiang Sun, Jiajie Lin, Min Zhou, Jianjun Zhang, Huiyun Liu, Tiangui You, Xin Ou
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引用次数: 0

摘要

可靠、高效和电泵浦的硅基激光器被认为是实现硅光子学所有关键构件集成的主要挑战。尽管在开发 1.3μm 硅基量子点(QD)激光器方面取得了令人瞩目的进展,但将波长窗口扩展到广泛使用的 1.55μm 电信区域仍然困难重重。在本研究中,我们开发了一种新颖的光子集成方法,即通过离子切割技术在晶圆级硅基 InP-on-Si (100) (InPOS) 异质衬底上外延生长 III-V 材料,从而在硅衬底上实现集成激光器。这种离子切割加外延生长方法消除了异质外延生长过程中许多有害位错的相关根源,即晶格和畴错配。利用这种方法,我们实现了最先进的电泵浦、连续波(CW)1.55 微米硅基激光器性能,室温阈值电流密度为 0.65 kA/cm-2,在 CW 模式下,每个刻面的输出功率超过 155 mW,且无需刻面涂层。实现了 120 °C 下的 CW 激光和 130 °C 以上的脉冲激光。这种通用方法还可应用于其他材料系统,为光子学和微电子学提供更好的性能和更多功能。
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High-power, electrically-driven continuous-wave 1.55-μm Si-based multi-quantum well lasers with a wide operating temperature range grown on wafer-scale InP-on-Si (100) heterogeneous substrate.

A reliable, efficient and electrically-pumped Si-based laser is considered as the main challenge to achieve the integration of all key building blocks with silicon photonics. Despite the impressive advances that have been made in developing 1.3-μm Si-based quantum dot (QD) lasers, extending the wavelength window to the widely used 1.55-μm telecommunication region remains difficult. In this study, we develop a novel photonic integration method of epitaxial growth of III-V on a wafer-scale InP-on-Si (100) (InPOS) heterogeneous substrate fabricated by the ion-cutting technique to realize integrated lasers on Si substrate. This ion-cutting plus epitaxial growth approach decouples the correlated root causes of many detrimental dislocations during heteroepitaxial growth, namely lattice and domain mismatches. Using this approach, we achieved state-of-the-art performance of the electrically-pumped, continuous-wave (CW) 1.55-µm Si-based laser with a room-temperature threshold current density of 0.65 kA/cm-2, and output power exceeding 155 mW per facet without facet coating in CW mode. CW lasing at 120 °C and pulsed lasing at over 130 °C were achieved. This generic approach is also applied to other material systems to provide better performance and more functionalities for photonics and microelectronics.

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来源期刊
CiteScore
27.00
自引率
2.60%
发文量
331
审稿时长
20 weeks
期刊介绍: Light: Science & Applications is an open-access, fully peer-reviewed publication.It publishes high-quality optics and photonics research globally, covering fundamental research and important issues in engineering and applied sciences related to optics and photonics.
期刊最新文献
Research progress on aero-optical effects of hypersonic optical window with film cooling. Highly-efficient (>70%) and Wide-spectral (400-1700 nm) sub-micron-thick InGaAs photodiodes for future high-resolution image sensors. Extended-depth of field random illumination microscopy, EDF-RIM, provides super-resolved projective imaging. Publisher Correction: Photon shifting and trapping in perovskite solar cells for improved efficiency and stability. Electrically tunable planar liquid-crystal singlets for simultaneous spectrometry and imaging.
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