Xiaoqi Zeng, Ji Chen, Xiaofeng Wang, Mingzhen Shao
{"title":"测量薄膜的折射率和厚度:光学偏振实验","authors":"Xiaoqi Zeng, Ji Chen, Xiaofeng Wang, Mingzhen Shao","doi":"10.1088/1361-6404/ad358c","DOIUrl":null,"url":null,"abstract":"\n We propose a teaching apparatus to simultaneously measure the refractive index and thickness of a thin film. The apparatus includes: a diode laser, a polarizer, a spectrometer, a photodiode and a portable digital multimeter. With the apparatus, we measure the refractive index and thickness of two thin films (a silicon dioxide film on silicon, a silicon nitride film on silicon). The maximum discrepancy between our apparatus and an ellipsometer is 1.4%. We also analyze the errors of our apparatus by numerical simulations. The lab with the apparatus described here has several valuable pedagogical outcomes: 1) understanding the multi-beam interference in a film; 2) applying chi-square minimization; 3) carrying out the nonlinear curve fitting with multiple parameters. The lab can be used in an optical polarization teaching for undergraduate sophomores.","PeriodicalId":505733,"journal":{"name":"European Journal of Physics","volume":"54 15","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Measuring the Refractive Index and Thickness of a Thin Film: an Optical Polarization Experiment\",\"authors\":\"Xiaoqi Zeng, Ji Chen, Xiaofeng Wang, Mingzhen Shao\",\"doi\":\"10.1088/1361-6404/ad358c\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n We propose a teaching apparatus to simultaneously measure the refractive index and thickness of a thin film. The apparatus includes: a diode laser, a polarizer, a spectrometer, a photodiode and a portable digital multimeter. With the apparatus, we measure the refractive index and thickness of two thin films (a silicon dioxide film on silicon, a silicon nitride film on silicon). The maximum discrepancy between our apparatus and an ellipsometer is 1.4%. We also analyze the errors of our apparatus by numerical simulations. The lab with the apparatus described here has several valuable pedagogical outcomes: 1) understanding the multi-beam interference in a film; 2) applying chi-square minimization; 3) carrying out the nonlinear curve fitting with multiple parameters. The lab can be used in an optical polarization teaching for undergraduate sophomores.\",\"PeriodicalId\":505733,\"journal\":{\"name\":\"European Journal of Physics\",\"volume\":\"54 15\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-03-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"European Journal of Physics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1088/1361-6404/ad358c\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"European Journal of Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1088/1361-6404/ad358c","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Measuring the Refractive Index and Thickness of a Thin Film: an Optical Polarization Experiment
We propose a teaching apparatus to simultaneously measure the refractive index and thickness of a thin film. The apparatus includes: a diode laser, a polarizer, a spectrometer, a photodiode and a portable digital multimeter. With the apparatus, we measure the refractive index and thickness of two thin films (a silicon dioxide film on silicon, a silicon nitride film on silicon). The maximum discrepancy between our apparatus and an ellipsometer is 1.4%. We also analyze the errors of our apparatus by numerical simulations. The lab with the apparatus described here has several valuable pedagogical outcomes: 1) understanding the multi-beam interference in a film; 2) applying chi-square minimization; 3) carrying out the nonlinear curve fitting with multiple parameters. The lab can be used in an optical polarization teaching for undergraduate sophomores.