电弧蒸发靶材中 Nb 和 Al 含量对 Ti1-x-yAlxNbyN 涂层性能的影响

Henry Dempwolf, S. Malz, Alexander Schacht, Christian Fabry, Axel Baumann, Olaf Kessler
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摘要

钛基物理气相沉积(PVD)涂层,如氮化钛(TiN)和氮化铌钛(TiNbN),是医疗应用中常见的表面改性解决方案。对取回的膝关节植入物进行的体内外研究表明,临床应用中需要提高 PVD 涂层的抗划伤和耐磨性。鉴于氮化钛铝(TiAlN)作为工具涂层具有良好的机械性能,本研究旨在评估铝(Al)和铌(Nb)化学成分对钛基氮化涂层的影响。采用随机多因素响应面设计,在工业规模的电弧 PVD 过程中涂覆了九种 0.4 ≤ x < 0.7 和 0 ≤ y ≤ 0.18 的钛铝铌氮化物(Ti1-x-yAlxNbyN)涂层,以及商用 TiN 和 TiNbN。涂层的沉积率、抗划伤性和硬度都是按照标准化规程测量的。涂层的微观结构通过 SEM 和 XRD 进行了分析。此外,还利用激光扫描显微镜测定了表面粗糙度。为确定化学成分对涂层性能的影响,进行了二次回归。实验结果和回归分析表明,Ti1-x-yAlxNbyN 的化学成分对涂层的微观结构、力学和形态有显著影响。与 TiN 相比,最初裂纹形成和内聚失效的抗划伤性得到了决定性的提高。
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Impact of Nb and Al content in arc evaporation targets on Ti1−x−yAlxNbyN coating properties
Titanium-based physical vapor deposition (PVD) coatings, such as titanium nitride (TiN) and titanium niobium nitride (TiNbN), are common solutions for surface modifications in medical applications. Ex vivo studies of retrieved knee implants indicate the demand for increased scratch and abrasion resistance of PVD coatings in clinical applications. Based on the promising mechanical performance of titanium aluminum nitride (TiAlN) as a coating for tools, the aim of this study was to evaluate the impact of the chemical composition of titanium-based nitride coatings with aluminum (Al) and niobium (Nb). Nine titanium aluminum niobium nitride (Ti1−x−yAlxNbyN) coatings with 0.4 ≤ x < 0.7 and 0 ≤ y ≤ 0.18, as well as commercial TiN and TiNbN, were coated in an industrial scale arc PVD process, following a randomized, multifactorial response surface design. The deposition rate, the scratch resistance, and the hardness were measured following standardized protocols. The microstructure of the coating was analyzed by SEM and XRD. In addition, the surface roughness was determined by laser scanning microscopy. A quadratic regression was performed to determine the impact of the chemical composition on coating properties. Experimental results and regression analyses revealed the significant impact of the chemical composition of Ti1−x−yAlxNbyN on the coating microstructure, mechanics, and morphology. Scratch resistance for initial crack formation and cohesive failure could be increased decisively, compared to TiN.
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