用于增强现实应用的反应离子束蚀刻高度均匀的斜光栅

{"title":"用于增强现实应用的反应离子束蚀刻高度均匀的斜光栅","authors":"Maryam Souri, Vincent Ip, Matthias Falmbigl, Meng Lee, Mark Campo, Robert Caldwell","doi":"10.1117/12.3001026","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517740,"journal":{"name":"Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) V","volume":"126 3","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Reactive ion beam etch of highly uniform slanted gratings for augmented reality applications\",\"authors\":\"Maryam Souri, Vincent Ip, Matthias Falmbigl, Meng Lee, Mark Campo, Robert Caldwell\",\"doi\":\"10.1117/12.3001026\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":517740,\"journal\":{\"name\":\"Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) V\",\"volume\":\"126 3\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-03-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) V\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.3001026\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) V","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3001026","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}