设计基于氧化锌的氨气传感器,用于分析关键基础设施的危害

Natalia Minska, Oleh Bas, Viktor Hvozd, O. Hryhorenko, Alexander Levterov, Murat Maliarov, Mykola Matiushenko, Serhii Tarasov, Roman Chernysh, O. Shevchenko
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引用次数: 0

摘要

我们设计了一种基于氧化锌的气体传感器,该传感器在标准条件下(温度 25 °С ;压力 101.3 kPa)对 NH3 具有灵敏度。实验样品是通过直流磁控溅射制造的。生产 ZnO 薄膜使用的是 VUP-5M 真空装置,该装置配备了独创的节材磁控管。为了分析氨气(NH3)气体传感器在标准条件下的效率,对其工作特性进行了研究。用于研究工作特性的 NH3 浓度选为 25 ppm。为了确定仪器结构触点的电阻率,在 -100 至 +100 V 的电压范围内检查了气体传感器的电流-电压特性。为了研究气体传感器对目标气体的灵敏度,研究了标准条件下浓度为 25 ppm 的 NH3 对气体传感器敏感层电阻的影响。研究结果表明,气体传感器对目标气体的灵敏度很高,达到 229 个相对单位。对气体传感器响应和恢复时间的研究表明,氧化锌气体传感器的响应和恢复时间分别为 20 秒和 26 秒。对氧化锌气体传感器的选择性进行了研究。选择性研究是通过确定气体传感器在甲醇、乙醇和丙酮等各种气体蒸汽存在时的灵敏度来进行的。研究结果表明,与对其他气体的反应相比,对氨的反应具有选择性。对氨气传感器工作特性的研究结果表明,在标准条件和目标气体浓度较低的情况下,氨气传感器的应用效率很高。
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Design of ammonia sensor based on ZnO for analyzing hazards at critical infrastructure
A gas sensor based on ZnO has been designed, which demonstrates sensitivity to NH3 under standard conditions (temperature, 25 °С; pressure, 101.3 kPa). The experimental sample was manufactured by magnetron sputtering at direct current. A VUP-5M vacuum unit with an original material-saving magnetron was used to produce ZnO films. To analyze the efficiency of the gas sensor to ammonia (NH3) under standard conditions, its operating characteristics were studied. The concentration of NH3 for investigating operating characteristics was chosen at the level of 25 ppm. To determine the resistivity of the contacts of the instrument structure, the current-voltage characteristics of the gas sensor were examined in the voltage range between −100 and +100 V. Based on the results of investigating the current-voltage characteristics, which have a linear character, the resistivity of the contacts was confirmed. To study the sensitivity of the gas sensor to the target gas, the change in resistance of the sensitive layer of the gas sensor under the influence of NH3 with a concentration of 25 ppm under standard conditions was explored. The study results demonstrated the high sensitivity of the gas sensor to the target gas – at the level of 229 relative units. The investigation of the response and recovery time of the gas sensor showed that the ZnO-based gas sensor has a response and recovery time of 20 and 26 s, respectively. The selectivity of the ZnO-based gas sensor was studied. The selectivity study was carried out by determining the sensitivity of the gas sensor in the presence of vapors of various gases, namely methanol, ethanol, acetone. The study results showed that the reaction to ammonia is selective compared to the reaction to other gases. The results of examining the working characteristics of the ammonia gas sensor demonstrate the high efficiency of its application under standard conditions and a low concentration of the target gas
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来源期刊
Eastern-European Journal of Enterprise Technologies
Eastern-European Journal of Enterprise Technologies Mathematics-Applied Mathematics
CiteScore
2.00
自引率
0.00%
发文量
369
审稿时长
6 weeks
期刊介绍: Terminology used in the title of the "East European Journal of Enterprise Technologies" - "enterprise technologies" should be read as "industrial technologies". "Eastern-European Journal of Enterprise Technologies" publishes all those best ideas from the science, which can be introduced in the industry. Since, obtaining the high-quality, competitive industrial products is based on introducing high technologies from various independent spheres of scientific researches, but united by a common end result - a finished high-technology product. Among these scientific spheres, there are engineering, power engineering and energy saving, technologies of inorganic and organic substances and materials science, information technologies and control systems. Publishing scientific papers in these directions are the main development "vectors" of the "Eastern-European Journal of Enterprise Technologies". Since, these are those directions of scientific researches, the results of which can be directly used in modern industrial production: space and aircraft industry, instrument-making industry, mechanical engineering, power engineering, chemical industry and metallurgy.
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