电化学阳极氧化辅助制造忆阻器

IF 16.1 1区 工程技术 Q1 ENGINEERING, MANUFACTURING International Journal of Extreme Manufacturing Pub Date : 2024-02-22 DOI:10.1088/2631-7990/ad2c61
Shuai-Bin Hua, Tian Jin, Xin Guo
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引用次数: 0

摘要

由于具有结构简单、功耗低和高密度集成等优点,忆阻器或忆阻器件在下一代非易失性存储器、神经形态计算和数据加密等领域受到越来越多的关注。然而,忆阻器薄膜的沉积通常需要昂贵的设备和严格的真空条件,过程耗能高,而且非常耗时。相比之下,电化学阳极氧化法可以在环境条件下快速(如 10 秒内)生成金属氧化物薄膜。通过阳极氧化技术,可以制造出氧化物薄膜、氧化物纳米管、纳米线和纳米点,从而制备出忆阻器。通过调整氧化参数,如电压、电流和时间,可以改变氧化膜厚度、纳米结构、缺陷浓度等,从而调节器件性能。因此,利用阳极氧化技术制造的忆阻器可以实现器件的高一致性、低变异性和超高成品率。本文全面回顾了阳极氧化辅助制造忆阻器领域的研究进展。首先介绍了阳极氧化的原理,然后介绍了阳极氧化法生产的不同类型的忆阻器,最后阐述了阳极氧化法生产忆阻器的特点和面临的挑战。
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Electrochemical anodic oxidation assisted fabrication of memristors
Owing to the advantages of simple structure, low power consumption and high-density integration, memristors or memristive devices are attracting increasing attention in the fields of next generation nonvolatile memories, neuromorphic computation and data encryption, etc. However, the deposition of memristive films often requires expensive equipment and strict vacuum conditions, the process consumes high energy, and it is also very time–consuming. In contrast, electrochemical anodizing can produce metal oxide films quickly (e.g. in 10 s) under ambient conditions. By means of the anodizing technique, oxide films, oxide nanotubes, nanowires and nanodots can be fabricated to prepare memristors. Through adjusting oxidation parameters such as voltage, current and time, oxide film thickness, nanostructures, defect concentrations, etc., can be varied to regulate device performances. Thus memristors fabricated by the anodic oxidation technique can achieve high device consistency, low variation, and ultra–high yield rate. This article provides a comprehensive review of the research progress in the field of anodic oxidation assisted fabrication of memristors. Firstly, the principle of anodic oxidation is introduced; then different types of memristors produced by the anodic oxidation are presented; finally, features and challenges of the anodic oxidation for memristor production are elaborated.
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来源期刊
International Journal of Extreme Manufacturing
International Journal of Extreme Manufacturing Engineering-Industrial and Manufacturing Engineering
CiteScore
17.70
自引率
6.10%
发文量
83
审稿时长
12 weeks
期刊介绍: The International Journal of Extreme Manufacturing (IJEM) focuses on publishing original articles and reviews related to the science and technology of manufacturing functional devices and systems with extreme dimensions and/or extreme functionalities. The journal covers a wide range of topics, from fundamental science to cutting-edge technologies that push the boundaries of currently known theories, methods, scales, environments, and performance. Extreme manufacturing encompasses various aspects such as manufacturing with extremely high energy density, ultrahigh precision, extremely small spatial and temporal scales, extremely intensive fields, and giant systems with extreme complexity and several factors. It encompasses multiple disciplines, including machinery, materials, optics, physics, chemistry, mechanics, and mathematics. The journal is interested in theories, processes, metrology, characterization, equipment, conditions, and system integration in extreme manufacturing. Additionally, it covers materials, structures, and devices with extreme functionalities.
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