物理和化学方法：薄膜制备方法沉积参数分析综述

{"title":"物理和化学方法：薄膜制备方法沉积参数分析综述","authors":"","doi":"10.18576/ijtfst/130107","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":37038,"journal":{"name":"International Journal of Thin Film Science and Technology","volume":"69 1-2","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Physical and Chemical Methods: A Review on the Analysis of Deposition Parameters of Thin Film Preparation Methods\",\"authors\":\"\",\"doi\":\"10.18576/ijtfst/130107\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":37038,\"journal\":{\"name\":\"International Journal of Thin Film Science and Technology\",\"volume\":\"69 1-2\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Journal of Thin Film Science and Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.18576/ijtfst/130107\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"Materials Science\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Thin Film Science and Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.18576/ijtfst/130107","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"Materials Science","Score":null,"Total":0}