界面相变和几何形状改变了辐照薄膜中纳米级图案的形成

IF 1.4 4区 工程技术 Q2 ENGINEERING, MULTIDISCIPLINARY Journal of Engineering Mathematics Pub Date : 2024-04-17 DOI:10.1007/s10665-024-10361-3
Tyler P. Evans, Scott A. Norris
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引用次数: 0

摘要

在本文中,我们考虑了离子辐照薄膜的线性稳定性问题,在这种情况下,典型的无穿透边界条件被放宽为相变或质量守恒边界条件。当新材料进入薄膜并瞬间改变体积时,非晶-晶体界面上的密度跃迁会改变体积速度场。众所周知,在其他物理系统中,移动边界上的相变会影响线性稳定性,但在离子诱导纳米图案化的连续模型中尚未考虑过这种影响。我们还根据自由界面确定了非晶-晶体界面的简单闭式表达式,直接诉诸于碰撞级联的物理学原理,最近的研究表明,碰撞级联强烈改变了临界角,而在临界角处,图案形成预计会在辐照靶上开始。我们发现,非晶-晶体边界的相变与离子、靶材和能量有很强的相关性,加上对界面几何形状的精确描述,可以为离子诱导的纳米图案形成建立一个统一的、可预测的、连续的模型,该模型适用于多种系统。我们特别考虑了氩气辐照硅,在该系统中,非晶-晶体界面相变的存在似乎预示着实验观察到的图案形成在 1.5 千伏附近受到强烈抑制。
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Interfacial phase-change and geometry modify nanoscale pattern formation in irradiated thin films

In this paper, we consider the linear stability of ion-irradiated thin films where the typical no-penetration boundary condition has been relaxed to a phase-change or mass conservation boundary condition. This results in the modification of the bulk velocity field by the density jump across the amorphous–crystalline interface as new material enters the film and instantaneously changes volume. In other physical systems, phase change at a moving boundary is known to affect linear stability, but such an effect has not yet been considered in the context of continuum models of ion-induced nanopatterning. We also determine simple closed-form expressions for the amorphous–crystalline interface in terms of the free interface, appealing directly to the physics of the collision cascade, which was recently shown to strongly modify the critical angle at which pattern formation is predicted to begin on an irradiated target. We find that phase-change at the amorphous–crystalline boundary imparts a strong ion, target, and energy dependence and, alongside a precise description of the interfacial geometry, may contribute to a unified, predictive, and continuum-type model of ion-induced nanopatterning valid across a wide range of systems. In particular, we consider argon-irradiated silicon, where the presence of phase-change at the amorphous–crystalline interface appears to predict an experimentally observed, strong suppression of pattern formation near 1.5 keV for that system.

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来源期刊
Journal of Engineering Mathematics
Journal of Engineering Mathematics 工程技术-工程:综合
CiteScore
2.10
自引率
7.70%
发文量
44
审稿时长
6 months
期刊介绍: The aim of this journal is to promote the application of mathematics to problems from engineering and the applied sciences. It also aims to emphasize the intrinsic unity, through mathematics, of the fundamental problems of applied and engineering science. The scope of the journal includes the following: • Mathematics: Ordinary and partial differential equations, Integral equations, Asymptotics, Variational and functional−analytic methods, Numerical analysis, Computational methods. • Applied Fields: Continuum mechanics, Stability theory, Wave propagation, Diffusion, Heat and mass transfer, Free−boundary problems; Fluid mechanics: Aero− and hydrodynamics, Boundary layers, Shock waves, Fluid machinery, Fluid−structure interactions, Convection, Combustion, Acoustics, Multi−phase flows, Transition and turbulence, Creeping flow, Rheology, Porous−media flows, Ocean engineering, Atmospheric engineering, Non-Newtonian flows, Ship hydrodynamics; Solid mechanics: Elasticity, Classical mechanics, Nonlinear mechanics, Vibrations, Plates and shells, Fracture mechanics; Biomedical engineering, Geophysical engineering, Reaction−diffusion problems; and related areas. The Journal also publishes occasional invited ''Perspectives'' articles by distinguished researchers reviewing and bringing their authoritative overview to recent developments in topics of current interest in their area of expertise. Authors wishing to suggest topics for such articles should contact the Editors-in-Chief directly. Prospective authors are encouraged to consult recent issues of the journal in order to judge whether or not their manuscript is consistent with the style and content of published papers.
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