{"title":"绝缘体 XPS 指南:电子枪操作和优化、表面充电、控制充电、差分充电、有用的 FWHM、问题和解决方案以及建议","authors":"B. Vincent Crist","doi":"10.1116/6.0003439","DOIUrl":null,"url":null,"abstract":"Current day x-ray photoelectron spectroscopy (XPS) instrument makers have made significant advances in charge compensation systems over the last 20 years, which makes it easier to analyze insulators, but samples still have many differences in chemistry, dielectric properties, sizes, surface roughness, etc. that force instrument operators to tweak flood gun settings if they want or need to obtain high quality chemical state spectra that provide the most information. This guide teaches which flood gun variables to check, and how to optimize electron flood gun settings by presenting high energy resolution, chemical state spectra that show the result of using a poorly aligned flood gun on modern XPS instruments equipped with a monochromatic aluminum Kalpha x-ray source. This guide is focused on the XPS measurement of insulators—nonconductive metal oxides and polymers. This guide shows that by measuring commonly available polymers (polypropylene and polyethylene terephthalate) or ceramic materials (SiO2 and Al2O3), the operator can easily characterize the good and bad effects of XY position settings and other settings provided by modern electron flood gun systems. This guide includes many original, never-before-published XPS peak full width at half maximum (FWHM) that will greatly assist peak-fitting efforts. This guide reveals a direct correlation between electron count-rate and best charge-control settings. This guide discusses sample and instrument issues that affect surface charging and explains how to check the quality of charge control by measuring the FWHM and binding energy of C (1s) or O (1s) spectra produced from the sample currently being analyzed. A list of other charge-control methods is provided, along with advice and a best-known method. The availability of large extensive databases of actual spectra is extremely beneficial to users who need real-world examples of high quality chemical state spectra to guide their in-house efforts to collect high quality spectra and to interpret valuable information from the peak-fits of those spectra.","PeriodicalId":170900,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"27 8","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-04-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"XPS guide for insulators: Electron flood gun operation and optimization, surface charging, controlled charging, differential charging, useful FWHMs, problems and solutions, and advice\",\"authors\":\"B. 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This guide shows that by measuring commonly available polymers (polypropylene and polyethylene terephthalate) or ceramic materials (SiO2 and Al2O3), the operator can easily characterize the good and bad effects of XY position settings and other settings provided by modern electron flood gun systems. This guide includes many original, never-before-published XPS peak full width at half maximum (FWHM) that will greatly assist peak-fitting efforts. This guide reveals a direct correlation between electron count-rate and best charge-control settings. This guide discusses sample and instrument issues that affect surface charging and explains how to check the quality of charge control by measuring the FWHM and binding energy of C (1s) or O (1s) spectra produced from the sample currently being analyzed. A list of other charge-control methods is provided, along with advice and a best-known method. 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引用次数: 0
摘要
在过去的 20 年中,当今的 X 射线光电子能谱 (XPS) 仪器制造商在电荷补偿系统方面取得了长足的进步,这使得分析绝缘体变得更加容易,但样品在化学性质、介电性质、尺寸、表面粗糙度等方面仍然存在许多差异,这迫使仪器操作人员在希望或需要获得高质量的化学态光谱以提供最多信息时,必须对淹没枪设置进行调整。本指南通过展示高能量分辨率的化学态光谱,说明了在配备单色铝卡尔法 X 射线源的现代 XPS 仪器上使用对准不良的淹没枪所产生的结果,从而介绍了应检查哪些淹没枪变量,以及如何优化电子淹没枪设置。本指南重点介绍绝缘体-不导电金属氧化物和聚合物的 XPS 测量。本指南显示,通过测量常见的聚合物(聚丙烯和聚对苯二甲酸乙二酯)或陶瓷材料(SiO2 和 Al2O3),操作人员可以轻松描述 XY 位置设置和现代电子枪系统提供的其他设置的好坏影响。本指南包含许多从未公开过的 XPS 峰值半最大值全宽(FWHM)原始数据,对峰值拟合工作大有帮助。本指南揭示了电子计数率与最佳电荷控制设置之间的直接关联。本指南讨论了影响表面电荷的样品和仪器问题,并解释了如何通过测量当前正在分析的样品所产生的 C (1s) 或 O (1s) 光谱的 FWHM 和结合能来检查电荷控制的质量。此外,还提供了一份其他电荷控制方法的清单,以及建议和一种最著名的方法。用户需要高质量化学态光谱的实际示例,以指导其内部收集高质量光谱的工作,并从这些光谱的峰值拟合中解读有价值的信息。
XPS guide for insulators: Electron flood gun operation and optimization, surface charging, controlled charging, differential charging, useful FWHMs, problems and solutions, and advice
Current day x-ray photoelectron spectroscopy (XPS) instrument makers have made significant advances in charge compensation systems over the last 20 years, which makes it easier to analyze insulators, but samples still have many differences in chemistry, dielectric properties, sizes, surface roughness, etc. that force instrument operators to tweak flood gun settings if they want or need to obtain high quality chemical state spectra that provide the most information. This guide teaches which flood gun variables to check, and how to optimize electron flood gun settings by presenting high energy resolution, chemical state spectra that show the result of using a poorly aligned flood gun on modern XPS instruments equipped with a monochromatic aluminum Kalpha x-ray source. This guide is focused on the XPS measurement of insulators—nonconductive metal oxides and polymers. This guide shows that by measuring commonly available polymers (polypropylene and polyethylene terephthalate) or ceramic materials (SiO2 and Al2O3), the operator can easily characterize the good and bad effects of XY position settings and other settings provided by modern electron flood gun systems. This guide includes many original, never-before-published XPS peak full width at half maximum (FWHM) that will greatly assist peak-fitting efforts. This guide reveals a direct correlation between electron count-rate and best charge-control settings. This guide discusses sample and instrument issues that affect surface charging and explains how to check the quality of charge control by measuring the FWHM and binding energy of C (1s) or O (1s) spectra produced from the sample currently being analyzed. A list of other charge-control methods is provided, along with advice and a best-known method. The availability of large extensive databases of actual spectra is extremely beneficial to users who need real-world examples of high quality chemical state spectra to guide their in-house efforts to collect high quality spectra and to interpret valuable information from the peak-fits of those spectra.