由静电致动器驱动的带垂直运动快门的柔性 PCB 微机电系统现场铣床

{"title":"由静电致动器驱动的带垂直运动快门的柔性 PCB 微机电系统现场铣床","authors":"Tao Chen, Cyrus Shafai","doi":"10.3390/proceedings2024097201","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517679,"journal":{"name":"Eurosensors 2023","volume":"50 8","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A Flexible PCB-Based MEMS Field Mill with a Vertical Movement Shutter Driven by an Electrostatic Actuator\",\"authors\":\"Tao Chen, Cyrus Shafai\",\"doi\":\"10.3390/proceedings2024097201\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":517679,\"journal\":{\"name\":\"Eurosensors 2023\",\"volume\":\"50 8\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-04-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Eurosensors 2023\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.3390/proceedings2024097201\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Eurosensors 2023","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.3390/proceedings2024097201","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}