集束离子轰击显著降低电隔离离子液体的表面电荷量

Yukio Fujiwara
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摘要

正离子束轰击样品所造成的表面充电是材料加工和表面分析中的一个重要问题。通常认为,在没有电荷补偿的情况下,电绝缘样品的充电电位会随着正离子束加速电压的增加而增加。然而,与通常的看法相反,本文报告了电绝缘离子液体靶的充电电位会随着正簇离子束加速电压的增加而降低。本文使用了一种典型的离子液体--1-乙基-3-甲基咪唑鎓双(三氟甲烷磺酰)酰胺(EMI-TFSA)作为靶。将其放置在与地面电隔离的金属板上,使用高阻抗电度计测量其在集束离子轰击期间的充电电位。为了进行比较,还使用了一块电绝缘金属板。这项研究表明,充电电位因簇离子种类和目标材料的不同而有很大差异。金属板的充电电位随辐照时间单调增加,而离子液体靶的充电电位在较低电压下就达到饱和。离子液体靶的充电电位随着离子束加速电压的增加而降低,即使束流增加。与较轻的团簇离子(m/z 111)相比,较大的团簇离子(m/z 502)造成的电荷积累较少。考虑到离子液体靶的二次离子发射会减少进入靶的净电荷,从而导致表面电荷减少,因此可以解释上述结果。
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Significant decrease in surface charging of electrically isolated ionic liquid by cluster ion bombardment
Surface charging caused by the bombardment of samples with positive ion beams is a significant problem in material processing and surface analysis. The charging potential of an electrically isolated sample is commonly believed to increase with the acceleration voltage of a positive ion beam in the absence of charge compensation. Contrary to the common belief, however, this paper reports that the charging potential of an electrically isolated ionic liquid target decreases with increasing acceleration voltage of a positive cluster ion beam. A typical ionic liquid, 1-ethyl-3-methyl imidazolium bis(trifluoromethanesulfonyl)amide (EMI-TFSA), was used as the target. It was placed on a metal plate that was electrically isolated from the ground, and its charging potential during cluster ion bombardment was measured with a high-impedance electrometer. For comparison, an electrically isolated metal plate was used. This study demonstrates that the charging potential varies significantly depending on cluster ion species and target materials. The charging potential of the metal plate increased monotonically with the irradiation time, whereas that of the ionic liquid target saturated at a lower voltage. The charging potential of the ionic liquid target decreased with increasing acceleration voltage of the ion beam even though the beam current increased. Larger cluster ions (m/z 502) caused less charge buildup than lighter cluster ions (m/z 111). The results obtained are explained by considering secondary ion emission from the ionic liquid target, which reduce the incoming net charge into the target, resulting in reduced surface charging.
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