通过离子束辅助轰击植入 C 的铜的摩擦和磨损行为

Changhui Li, Jiajun Zhu, Juanrui Hu, Leilei Hao, Bin Ji, L. Fu, Wulin Yang, Lingping Zhou
{"title":"通过离子束辅助轰击植入 C 的铜的摩擦和磨损行为","authors":"Changhui Li, Jiajun Zhu, Juanrui Hu, Leilei Hao, Bin Ji, L. Fu, Wulin Yang, Lingping Zhou","doi":"10.1116/6.0003495","DOIUrl":null,"url":null,"abstract":"This work modified the surface of copper using physical vapor deposition and investigated the wear behavior of the modified copper at low load and sliding speed. The results of the study showed that the adhesion between the thin film prepared using the ion beam deposition technique and the substrate was insufficient, leading to an increased wear rate of copper after surface modification. However, when carbon particles were injected using ion beam-assisted bombardment, the friction properties of copper were significantly improved, with a decrease in wear rate from 1.6 × 10−4 to 8 × 10−6 mm3/N m and a 40% reduction in friction coefficient. This improvement can be attributed to the amorphous carbon layer on the copper surface, as well as the injection of carbon particles into the substrate, which enhanced the adhesion between the film and the substrate. Furthermore, a continuous copper oxide film formed during the friction and wear process, providing lubrication and protection to the substrate in conjunction with the amorphous carbon layer. Additionally, the primary wear mechanism of copper shifted from abrasive and adhesive wear to oxidation wear after ion beam-assisted bombardment with carbon injection. This study provides new insights and methods for material design and engineering applications by investigating the effects of ion beam-assisted bombardment technology on the wear resistance of copper materials.","PeriodicalId":170900,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"81 11","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-04-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Friction and wear behavior of C implanted copper via ion beam-assisted bombardment\",\"authors\":\"Changhui Li, Jiajun Zhu, Juanrui Hu, Leilei Hao, Bin Ji, L. Fu, Wulin Yang, Lingping Zhou\",\"doi\":\"10.1116/6.0003495\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This work modified the surface of copper using physical vapor deposition and investigated the wear behavior of the modified copper at low load and sliding speed. The results of the study showed that the adhesion between the thin film prepared using the ion beam deposition technique and the substrate was insufficient, leading to an increased wear rate of copper after surface modification. However, when carbon particles were injected using ion beam-assisted bombardment, the friction properties of copper were significantly improved, with a decrease in wear rate from 1.6 × 10−4 to 8 × 10−6 mm3/N m and a 40% reduction in friction coefficient. This improvement can be attributed to the amorphous carbon layer on the copper surface, as well as the injection of carbon particles into the substrate, which enhanced the adhesion between the film and the substrate. Furthermore, a continuous copper oxide film formed during the friction and wear process, providing lubrication and protection to the substrate in conjunction with the amorphous carbon layer. Additionally, the primary wear mechanism of copper shifted from abrasive and adhesive wear to oxidation wear after ion beam-assisted bombardment with carbon injection. This study provides new insights and methods for material design and engineering applications by investigating the effects of ion beam-assisted bombardment technology on the wear resistance of copper materials.\",\"PeriodicalId\":170900,\"journal\":{\"name\":\"Journal of Vacuum Science & Technology A\",\"volume\":\"81 11\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-04-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Vacuum Science & Technology A\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0003495\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology A","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0003495","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

这项研究利用物理气相沉积技术对铜的表面进行了改性,并研究了改性后的铜在低负载和滑动速度下的磨损行为。研究结果表明,使用离子束沉积技术制备的薄膜与基底之间的附着力不足,导致铜表面改性后的磨损率增加。然而,当使用离子束辅助轰击技术注入碳颗粒时,铜的摩擦性能得到了显著改善,磨损率从 1.6 × 10-4 mm3/N m 降至 8 × 10-6 mm3/N m,摩擦系数降低了 40%。这种改善可归因于铜表面的无定形碳层,以及碳颗粒注入基底,增强了薄膜与基底之间的附着力。此外,在摩擦和磨损过程中形成了连续的氧化铜膜,与无定形碳层一起为基底提供润滑和保护。此外,在离子束辅助轰击碳喷射后,铜的主要磨损机制从磨蚀和粘附磨损转变为氧化磨损。这项研究通过研究离子束辅助轰击技术对铜材料耐磨性的影响,为材料设计和工程应用提供了新的见解和方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Friction and wear behavior of C implanted copper via ion beam-assisted bombardment
This work modified the surface of copper using physical vapor deposition and investigated the wear behavior of the modified copper at low load and sliding speed. The results of the study showed that the adhesion between the thin film prepared using the ion beam deposition technique and the substrate was insufficient, leading to an increased wear rate of copper after surface modification. However, when carbon particles were injected using ion beam-assisted bombardment, the friction properties of copper were significantly improved, with a decrease in wear rate from 1.6 × 10−4 to 8 × 10−6 mm3/N m and a 40% reduction in friction coefficient. This improvement can be attributed to the amorphous carbon layer on the copper surface, as well as the injection of carbon particles into the substrate, which enhanced the adhesion between the film and the substrate. Furthermore, a continuous copper oxide film formed during the friction and wear process, providing lubrication and protection to the substrate in conjunction with the amorphous carbon layer. Additionally, the primary wear mechanism of copper shifted from abrasive and adhesive wear to oxidation wear after ion beam-assisted bombardment with carbon injection. This study provides new insights and methods for material design and engineering applications by investigating the effects of ion beam-assisted bombardment technology on the wear resistance of copper materials.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Measurements of atomic hydrogen recombination coefficients and the reduction of Al2O3 using a heat flux sensor Extension of ion-neutral reactive collision model DNT+ to polar molecules based on average dipole orientation theory Molecular beam epitaxy of Pd-Fe graded alloy films for standing spin waves control Revealing the controlling mechanisms of atomic layer etching for high-k dielectrics in conventional inductively coupled plasma etching tool Introduction to reproducible laboratory hard x-ray photoelectron spectroscopy
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1