Jaydip Sawant, Ketan Bhotkar, Y. Yu, Kyu Chang Park
{"title":"光束和栅极偏移尺寸对冷阴极电子束 X 射线焦斑分辨率的影响","authors":"Jaydip Sawant, Ketan Bhotkar, Y. Yu, Kyu Chang Park","doi":"10.1116/6.0003390","DOIUrl":null,"url":null,"abstract":"In x-ray imaging, high resolution is essential, particularly in sectors such as medical and industries where the need for nondestructive defect detection is required. Previous research has shown that altering beam design and the number of gates offset holes has an impact on focal spot size (FSS). However, the specific effects of beam size and offset size were not thoroughly assessed. In the present study, the influence of beam size and gate offset size was evaluated by utilizing a cold cathode electron beam. Various beam sizes were employed to achieve a small FSS, and subsequently, the smallest beam was utilized to examine the impact of gate offset size. In doing so, the smallest FSS of 0.25 mm vertical and 0.33 mm horizontal was attained without the utilization of any additional focusing lens. This illustrates that by adjusting the beam size and gate offset size, it is possible to attain a small FSS, facilitating the development of an economically viable x-ray imaging beam.","PeriodicalId":282302,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"10 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Effect of beam and gate offset size on x-ray focal spot resolution of a cold cathode electron beam\",\"authors\":\"Jaydip Sawant, Ketan Bhotkar, Y. Yu, Kyu Chang Park\",\"doi\":\"10.1116/6.0003390\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In x-ray imaging, high resolution is essential, particularly in sectors such as medical and industries where the need for nondestructive defect detection is required. Previous research has shown that altering beam design and the number of gates offset holes has an impact on focal spot size (FSS). However, the specific effects of beam size and offset size were not thoroughly assessed. In the present study, the influence of beam size and gate offset size was evaluated by utilizing a cold cathode electron beam. Various beam sizes were employed to achieve a small FSS, and subsequently, the smallest beam was utilized to examine the impact of gate offset size. In doing so, the smallest FSS of 0.25 mm vertical and 0.33 mm horizontal was attained without the utilization of any additional focusing lens. This illustrates that by adjusting the beam size and gate offset size, it is possible to attain a small FSS, facilitating the development of an economically viable x-ray imaging beam.\",\"PeriodicalId\":282302,\"journal\":{\"name\":\"Journal of Vacuum Science & Technology B\",\"volume\":\"10 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-04-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Vacuum Science & Technology B\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0003390\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology B","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0003390","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
摘要
在 X 射线成像中,高分辨率至关重要,尤其是在需要进行无损缺陷检测的医疗和工业等领域。以往的研究表明,改变光束设计和栅极偏移孔的数量会影响焦斑尺寸(FSS)。然而,光束尺寸和偏移尺寸的具体影响尚未得到全面评估。本研究利用冷阴极电子束评估了光束尺寸和栅极偏移尺寸的影响。为了实现小型 FSS,我们采用了不同的光束尺寸,然后利用最小的光束来检验栅极偏移尺寸的影响。这样,在不使用任何额外聚焦透镜的情况下,实现了垂直方向 0.25 毫米、水平方向 0.33 毫米的最小 FSS。这说明,通过调整光束尺寸和栅极偏移尺寸,可以获得较小的 FSS,从而促进开发出经济可行的 X 射线成像光束。
Effect of beam and gate offset size on x-ray focal spot resolution of a cold cathode electron beam
In x-ray imaging, high resolution is essential, particularly in sectors such as medical and industries where the need for nondestructive defect detection is required. Previous research has shown that altering beam design and the number of gates offset holes has an impact on focal spot size (FSS). However, the specific effects of beam size and offset size were not thoroughly assessed. In the present study, the influence of beam size and gate offset size was evaluated by utilizing a cold cathode electron beam. Various beam sizes were employed to achieve a small FSS, and subsequently, the smallest beam was utilized to examine the impact of gate offset size. In doing so, the smallest FSS of 0.25 mm vertical and 0.33 mm horizontal was attained without the utilization of any additional focusing lens. This illustrates that by adjusting the beam size and gate offset size, it is possible to attain a small FSS, facilitating the development of an economically viable x-ray imaging beam.