铋表面活性剂在宽生长温度范围内增强 MBE 生长的 GaSb(100) 薄膜的表面形态和薄膜质量

T. P. Menasuta, Kevin A. Grossklaus, John H. McElearney, Thomas E. Vandervelde
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摘要

我们研究了在 Veeco GENxplor 系统中通过分子束外延在 GaSb(100) 基底上生长的两个系列的同外延 GaSb(100) 薄膜的表面形貌。第一个系列的生长温度为 290 至 490°C,作为对照。第二个系列的生长参数相同,但在生长过程中使用了铋作为表面活性剂。我们对这两个系列进行了比较,利用原子力显微镜研究了铋在生长温度范围内对 GaSb 表面形态的影响,并利用拉曼光谱和扫描电子显微镜研究了薄膜的特性。我们还进行了高分辨率 X 射线衍射,以确认薄膜中没有掺入铋。我们发现,无铋生长的 GaSb 系列的形态演变符合标准的表面成核理论,并确定 2D-3D 转变温度接近 290 摄氏度。与此相反,我们发现在生长过程中铋表面活性剂的存在会显著改变表面形态,并防止在低温下出现不希望出现的三维孤岛。我们还观察到,在高生长温度下,小丘形态优于阶梯形态;在中间温度下,反阶梯串联效应;在低温下,从阶梯蜿蜒形态演变为小丘形态。这种与第一系列的形态差异表明,铋会显著增加原子梯田的二维埃利希-施沃贝尔势垒,诱导上坡的原子通量,从而使表面变得平滑。我们的研究结果表明,铋表面活性剂可以改善低温生长的镓锑的表面形态和薄膜结构。铋表面活性剂还可以改善在非理想条件下生长的其他同向外延 III-V 系统。
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Bismuth surfactant enhancement of surface morphology and film quality of MBE-grown GaSb(100) thin films over a wide range of growth temperatures
We investigate the surface morphologies of two series of homoepitaxial GaSb(100) thin films grown on GaSb(100) substrates by molecular beam epitaxy in a Veeco GENxplor system. The first series was grown at temperatures ranging from 290 to 490°C and serves as a control. The second series was grown using the same growth parameters with bismuth used as a surfactant during growth. We compared the two series to examine the impacts of bismuth over the range of growth temperatures on the GaSb surface morphologies using atomic force microscopy and the film properties using Raman spectroscopy and scanning electron microscopy. High-resolution x-ray diffraction was performed to confirm that bismuth was not incorporated into the films. We found that the morphological evolution of the GaSb series grown without bismuth is consistent with the standard surface nucleation theory and identified the 2D-3D transition temperature as close to 290° C. In contrast, the presence of a Bi surfactant during growth was found to significantly alter the surface morphology and prevent undesired 3D islands at low temperatures. We also observed a preference for hillocks over step morphology at high growth temperatures, antistep bunching effects at intermediate temperatures, and the evolution from step-meandering to mound morphologies at low temperatures. This morphological divergence from the first series indicates that bismuth significantly increases in the 2D Erlich–Schwöebel potential barrier of the atomic terraces, inducing an uphill adatom flux that can smoothen the surface. Our findings demonstrate that bismuth surfactant can improve the surface morphology and film structure of low-temperature grown GaSb. Bismuth surfactant may also improve other homoepitaxial III-V systems grown in nonideal conditions.
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