L. A. Mochalov, M. A. Kudryashov, M. A. Vshivtsev, Yu. P. Kudryashova, I. O. Prokhorov, A. V. Knyazev, A. V. Almaev, N. N. Yakovlev, E. V. Chernikov, N. N. Erzakova
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引用次数: 0
摘要
摘要 首次在 c 平面蓝宝石衬底上通过等离子体增强化学气相沉积（PECVD）获得了β-Ga2O3-GaN 系统的纳米结构薄膜。高纯度金属镓以及高纯度气态氮和氧被用作宏观成分的来源。电感耦合射频（40.68 MHz）放电在低压（0.01 托）条件下产生的低温非平衡等离子体是反应物之间化学变化的引发剂。氧气和氮气的混合物被用作等离子体形成气体。利用光学发射光谱 (OES) 对等离子体化学过程进行了研究。通过各种分析方法对生成的 GaN 含量为 2% 至 7% 的 β-Ga2O3-GaN 薄膜进行了表征。
Direct One-Step Plasma-Chemical Synthesis of Nanostructured β-Ga2O3–GaN Thin Films of Various Compositions
Abstract
For the first time, nanostructured thin films of the β-Ga2O3−GaN system have been obtained by plasma-enhanced chemical vapor deposition (PECVD) on c-plane sapphire substrates. High-purity gallium metal, as well as high-purity gaseous nitrogen and oxygen, were used as sources of macrocomponents. Low-temperature nonequilibrium plasma of an inductively coupled RF (40.68 MHz) discharge at reduced pressure (0.01 torr) was the initiator of chemical transformations between the reactants. A mixture of oxygen and nitrogen was used as a plasma-forming gas. The plasma-chemical process was studied using optical emission spectroscopy (OES). The resulting β-Ga2O3−GaN thin films with a GaN content of 2 to 7% were characterized by various analytical methods.
期刊介绍：
High Energy Chemistry publishes original articles, reviews, and short communications on molecular and supramolecular photochemistry, photobiology, radiation chemistry, plasma chemistry, chemistry of nanosized systems, chemistry of new atoms, processes and materials for optical information systems and other areas of high energy chemistry. It publishes theoretical and experimental studies in all areas of high energy chemistry, such as the interaction of high-energy particles with matter, the nature and reactivity of short-lived species induced by the action of particle and electromagnetic radiation or hot atoms on substances in their gaseous and condensed states, and chemical processes initiated in organic and inorganic systems by high-energy radiation.
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