基于 Czochralski 生长晶体的 Pt/(100) β-Ga2O3 肖特基势垒二极管的导电和光电特性

Aleksei Almaev, V. Nikolaev, Nikita Yakovlev, Pavel Butenko, Alexander Tsymbalov, Michael Boiko, Viktor Kopyev, Vladimir Krymov, Bogdan Kushnarev, Sevastian Shapenkov, Michael Sharkov, Anton Zarichny
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摘要

利用从用 Czochralski 方法生长的晶体上切割下来的板制作了 Pt/(100) β-Ga2O3 肖特基势垒二极管。研究了它们的导电和光电特性。研究得出了以下数值:肖特基势垒高度(1.69/1.62/1.74 eV)、理想系数(1.09/1.14)、饱和电流密度(9.91 × 10-15 A/cm2)、二极管串联电阻(7.98 kΩ)和净供体浓度[(1.8-2.4) × 1018 cm-3]。在施加 ± 1 V 电压时,二极管的整流比高达 1010,漏电流密度的实验值相对较低∼10-11 A/cm2。这些结构不受太阳光影响,也能在自供电模式下工作。二极管对波长 λ ≤ 265 nm 的短波紫外线辐射高度敏感。在 λ = 210 nm 处和外加电压为 -1 V 时,二极管的响应率(20.4 A/W)、外部量子效率(1.2 × 104%)和检测率(9.6 × 1015 Hz0.5 × cm × W-1)均达到最大值。在自供电工作模式下,响应率和外部量子效率值分别为 12.3 A/W 和 7.2 × 103%。在自供电工作模式下,基于 Ga2O3 的光电二极管的上升和衰减时间较短:分别为 14 毫秒和 30 毫秒。
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Electroconductive and photoelectric properties of Pt/(100) β-Ga2O3 Schottky barrier diode based on Czochralski grown crystal
Pt/(100) β-Ga2O3 Schottky barrier diodes were fabricated using a plate cleaved from the crystal grown by Czochralski method. Their electroconductive and photoelectric characteristics were studied. The following values were obtained: the Schottky barrier height (1.69/1.62/1.74 eV), ideality coefficient (1.09/1.14), saturation current density (9.91 × 10–15 A/cm2), diode series resistance (7.98 kΩ), and net donor concentration [(1.8–2.4) × 1018 cm–3]. The diodes demonstrate a high rectification ratio of 1010 at an applied voltage of ± 1 V and a relatively low experimental value of the leakage current density ∼10–11 A/cm2. These structures are solar-blind and also capable of operating in self-powered mode. The diodes are highly sensitive to short-wave ultraviolet radiation with a wavelength λ ≤ 265 nm. The maximum values of responsivity (20.4 A/W), external quantum efficiency (1.2 × 104%), and detectivity (9.6 × 1015 Hz0.5 × cm × W–1) of diodes were registered under exposure to irradiation at λ = 210 nm and at applied voltage of −1 V. The responsivity and external quantum efficiency values in the self-powered operation mode were 12.3 A/W and 7.2 × 103%, respectively. The diodes showed low rise and decay times in self-powered operation mode for photodiode based on Ga2O3: 14 and 30 ms, respectively.
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