Aleksei Almaev, V. Nikolaev, Nikita Yakovlev, Pavel Butenko, Alexander Tsymbalov, Michael Boiko, Viktor Kopyev, Vladimir Krymov, Bogdan Kushnarev, Sevastian Shapenkov, Michael Sharkov, Anton Zarichny
{"title":"基于 Czochralski 生长晶体的 Pt/(100) β-Ga2O3 肖特基势垒二极管的导电和光电特性","authors":"Aleksei Almaev, V. Nikolaev, Nikita Yakovlev, Pavel Butenko, Alexander Tsymbalov, Michael Boiko, Viktor Kopyev, Vladimir Krymov, Bogdan Kushnarev, Sevastian Shapenkov, Michael Sharkov, Anton Zarichny","doi":"10.1116/6.0003618","DOIUrl":null,"url":null,"abstract":"Pt/(100) β-Ga2O3 Schottky barrier diodes were fabricated using a plate cleaved from the crystal grown by Czochralski method. Their electroconductive and photoelectric characteristics were studied. The following values were obtained: the Schottky barrier height (1.69/1.62/1.74 eV), ideality coefficient (1.09/1.14), saturation current density (9.91 × 10–15 A/cm2), diode series resistance (7.98 kΩ), and net donor concentration [(1.8–2.4) × 1018 cm–3]. The diodes demonstrate a high rectification ratio of 1010 at an applied voltage of ± 1 V and a relatively low experimental value of the leakage current density ∼10–11 A/cm2. These structures are solar-blind and also capable of operating in self-powered mode. The diodes are highly sensitive to short-wave ultraviolet radiation with a wavelength λ ≤ 265 nm. The maximum values of responsivity (20.4 A/W), external quantum efficiency (1.2 × 104%), and detectivity (9.6 × 1015 Hz0.5 × cm × W–1) of diodes were registered under exposure to irradiation at λ = 210 nm and at applied voltage of −1 V. The responsivity and external quantum efficiency values in the self-powered operation mode were 12.3 A/W and 7.2 × 103%, respectively. The diodes showed low rise and decay times in self-powered operation mode for photodiode based on Ga2O3: 14 and 30 ms, respectively.","PeriodicalId":170900,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"127 44","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-05-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Electroconductive and photoelectric properties of Pt/(100) β-Ga2O3 Schottky barrier diode based on Czochralski grown crystal\",\"authors\":\"Aleksei Almaev, V. Nikolaev, Nikita Yakovlev, Pavel Butenko, Alexander Tsymbalov, Michael Boiko, Viktor Kopyev, Vladimir Krymov, Bogdan Kushnarev, Sevastian Shapenkov, Michael Sharkov, Anton Zarichny\",\"doi\":\"10.1116/6.0003618\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Pt/(100) β-Ga2O3 Schottky barrier diodes were fabricated using a plate cleaved from the crystal grown by Czochralski method. Their electroconductive and photoelectric characteristics were studied. The following values were obtained: the Schottky barrier height (1.69/1.62/1.74 eV), ideality coefficient (1.09/1.14), saturation current density (9.91 × 10–15 A/cm2), diode series resistance (7.98 kΩ), and net donor concentration [(1.8–2.4) × 1018 cm–3]. The diodes demonstrate a high rectification ratio of 1010 at an applied voltage of ± 1 V and a relatively low experimental value of the leakage current density ∼10–11 A/cm2. These structures are solar-blind and also capable of operating in self-powered mode. The diodes are highly sensitive to short-wave ultraviolet radiation with a wavelength λ ≤ 265 nm. The maximum values of responsivity (20.4 A/W), external quantum efficiency (1.2 × 104%), and detectivity (9.6 × 1015 Hz0.5 × cm × W–1) of diodes were registered under exposure to irradiation at λ = 210 nm and at applied voltage of −1 V. The responsivity and external quantum efficiency values in the self-powered operation mode were 12.3 A/W and 7.2 × 103%, respectively. The diodes showed low rise and decay times in self-powered operation mode for photodiode based on Ga2O3: 14 and 30 ms, respectively.\",\"PeriodicalId\":170900,\"journal\":{\"name\":\"Journal of Vacuum Science & Technology A\",\"volume\":\"127 44\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-05-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Vacuum Science & Technology A\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0003618\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology A","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0003618","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Electroconductive and photoelectric properties of Pt/(100) β-Ga2O3 Schottky barrier diode based on Czochralski grown crystal
Pt/(100) β-Ga2O3 Schottky barrier diodes were fabricated using a plate cleaved from the crystal grown by Czochralski method. Their electroconductive and photoelectric characteristics were studied. The following values were obtained: the Schottky barrier height (1.69/1.62/1.74 eV), ideality coefficient (1.09/1.14), saturation current density (9.91 × 10–15 A/cm2), diode series resistance (7.98 kΩ), and net donor concentration [(1.8–2.4) × 1018 cm–3]. The diodes demonstrate a high rectification ratio of 1010 at an applied voltage of ± 1 V and a relatively low experimental value of the leakage current density ∼10–11 A/cm2. These structures are solar-blind and also capable of operating in self-powered mode. The diodes are highly sensitive to short-wave ultraviolet radiation with a wavelength λ ≤ 265 nm. The maximum values of responsivity (20.4 A/W), external quantum efficiency (1.2 × 104%), and detectivity (9.6 × 1015 Hz0.5 × cm × W–1) of diodes were registered under exposure to irradiation at λ = 210 nm and at applied voltage of −1 V. The responsivity and external quantum efficiency values in the self-powered operation mode were 12.3 A/W and 7.2 × 103%, respectively. The diodes showed low rise and decay times in self-powered operation mode for photodiode based on Ga2O3: 14 and 30 ms, respectively.