C. Pulzara-Mora, José Doria-Andrade, R. Bernal-Correa, Andrés Rosales-Rivera, Á. Pulzara-Mora
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引用次数: 0
摘要
几十年来,半导体材料的获取和研究一直是人们关注的话题。然而,在应用时能实现更大通用性的替代方法,如加入一些过渡金属,仍有待探索。在这项工作中,我们报告了在 Si (100) 衬底上通过 r.f. 磁控溅射法制备 GaAs 和 GaAs/Cr/GaAs 层的情况,中间铬层的沉积时间分别为 t = 5 分钟和 10 分钟。通过横截面扫描电子显微镜确定了砷化镓和砷化镓/铬/砷化镓薄膜的生长模式。通过能量色散光谱(EDS)测定了 GaAs/Cr/GaAs 薄膜中元素的百分比。测量了室温下的 X 射线衍射和微拉曼光谱,以分析 CrAs 和 GaCr 二元相通过层间扩散形成的情况。最后,我们总结了利用这种技术获得含铬半导体合金的可能性。
Characterization of GaAs and GaAs/Cr/GaAs interfacial layers fabricated via magnetron sputtering on silicon (100)
The obtaining and study of semiconductor materials have been topics of interest for decades. However, alternatives that allow greater versatility at the time of their application have yet to be explored, such as the inclusion of some transition metals. In this work, we report the obtaining of GaAs and GaAs/Cr/GaAs layers, which were prepared by r.f. magnetron sputtering on a Si (100) substrate by varying the deposition time of the intermediate Cr layer for t = 5 min and 10 min, respectively. Scanning electron microscopy in cross-section was carried out to determine the growth mode of the GaAs and GaAs/Cr/GaAs films. The percentage of the elements in the GaAs/Cr/GaAs thin films was determined through energy dispersive spectroscopy (EDS) in cross-sections along the entire layer thickness. X-ray diffraction and micro-Raman spectroscopy at room temperature were measured to analyze the formation of CrAs and GaCr binary phases by diffusion across interlayers. Finally, we conclude on the possible use of this technique to obtain semiconductor alloys with Cr inclusion.