{"title":"铟、锡和 ITO 在 Cr Kα 激发下的 HAXPES 参考光谱","authors":"Dong Zheng, Christopher N. Young, W. Stickle","doi":"10.1116/6.0003489","DOIUrl":null,"url":null,"abstract":"Hard x-ray photoelectron spectroscopy using monochromatic Cr Kα radiation (5414.8 eV) has been used to acquire XPS and Auger data on sputtered In, Sn, and ITO samples. Survey data, high-resolution scans of all observed photoelectron peaks, and high-resolution scans of Auger lines are presented herein.","PeriodicalId":22006,"journal":{"name":"Surface Science Spectra","volume":null,"pages":null},"PeriodicalIF":1.6000,"publicationDate":"2024-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"HAXPES reference spectra of In, Sn, and ITO with Cr Kα excitation\",\"authors\":\"Dong Zheng, Christopher N. Young, W. Stickle\",\"doi\":\"10.1116/6.0003489\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Hard x-ray photoelectron spectroscopy using monochromatic Cr Kα radiation (5414.8 eV) has been used to acquire XPS and Auger data on sputtered In, Sn, and ITO samples. Survey data, high-resolution scans of all observed photoelectron peaks, and high-resolution scans of Auger lines are presented herein.\",\"PeriodicalId\":22006,\"journal\":{\"name\":\"Surface Science Spectra\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":1.6000,\"publicationDate\":\"2024-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Surface Science Spectra\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0003489\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"PHYSICS, CONDENSED MATTER\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Surface Science Spectra","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0003489","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
引用次数: 0
摘要
使用单色 Cr Kα 辐射（5414.8 eV）的硬 X 射线光电子能谱获得了溅射 In、Sn 和 ITO 样品的 XPS 和奥杰数据。本文介绍了测量数据、所有观测到的光电子峰的高分辨率扫描以及奥杰线的高分辨率扫描。
HAXPES reference spectra of In, Sn, and ITO with Cr Kα excitation
Hard x-ray photoelectron spectroscopy using monochromatic Cr Kα radiation (5414.8 eV) has been used to acquire XPS and Auger data on sputtered In, Sn, and ITO samples. Survey data, high-resolution scans of all observed photoelectron peaks, and high-resolution scans of Auger lines are presented herein.
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