通过等离子体增强碳氢化合物和氢的化学气相沉积,在 Ti-45Al-2Nb-2Mn-1B 上形成硬碳层

A. Rastkar, Mehdi Sadri Kandjani
{"title":"通过等离子体增强碳氢化合物和氢的化学气相沉积,在 Ti-45Al-2Nb-2Mn-1B 上形成硬碳层","authors":"A. Rastkar, Mehdi Sadri Kandjani","doi":"10.1116/6.0003483","DOIUrl":null,"url":null,"abstract":"Extension of pulsed DC plasma enhanced CVD (PECVD) of carbon from hydrocarbons resulted in thick hard carbon layers on Ti-45Al-2Nb-2Mn-1B. PECVD for less than 2 h led to the formation of surface interlayers of TiC and Ti2AlC compounds under the hard carbon layer. After 5 h until 20 h, the formation of carbons layers surpassed the growth of TiC and Ti2AlC layers and resulted in a thicker hard carbon layer. This can be explained with the deceleration of carbon diffusion into the base alloy that resulted in the accumulation of a hard structure of carbon on the outer surface. The thickness of the hard carbon layers reached up to ∼40 μm, which were revealed using SEM microcopy. The hardness on the outer surface of hard carbon layer was around 600–1500 HV0.5 (5.88–14.71 GPa). EDX analysis across the surface layers showed ∼50–100 at. % carbon on the outermost layers. Raman spectroscopy of carbon layers showed sp3 (D) and sp2 (G) peaks of carbon at ∼1330 and ∼1560 cm−1 and peaks of TiC at ∼200 cm−1 peaks.","PeriodicalId":282302,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"41 4","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Evolution of hard carbon layers on Ti-45Al-2Nb-2Mn-1B by plasma enhanced chemical vapor deposition of hydrocarbons and hydrogen\",\"authors\":\"A. Rastkar, Mehdi Sadri Kandjani\",\"doi\":\"10.1116/6.0003483\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Extension of pulsed DC plasma enhanced CVD (PECVD) of carbon from hydrocarbons resulted in thick hard carbon layers on Ti-45Al-2Nb-2Mn-1B. PECVD for less than 2 h led to the formation of surface interlayers of TiC and Ti2AlC compounds under the hard carbon layer. After 5 h until 20 h, the formation of carbons layers surpassed the growth of TiC and Ti2AlC layers and resulted in a thicker hard carbon layer. This can be explained with the deceleration of carbon diffusion into the base alloy that resulted in the accumulation of a hard structure of carbon on the outer surface. The thickness of the hard carbon layers reached up to ∼40 μm, which were revealed using SEM microcopy. The hardness on the outer surface of hard carbon layer was around 600–1500 HV0.5 (5.88–14.71 GPa). EDX analysis across the surface layers showed ∼50–100 at. % carbon on the outermost layers. Raman spectroscopy of carbon layers showed sp3 (D) and sp2 (G) peaks of carbon at ∼1330 and ∼1560 cm−1 and peaks of TiC at ∼200 cm−1 peaks.\",\"PeriodicalId\":282302,\"journal\":{\"name\":\"Journal of Vacuum Science & Technology B\",\"volume\":\"41 4\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Vacuum Science & Technology B\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0003483\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology B","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0003483","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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摘要

对碳氢化合物中的碳进行脉冲直流等离子体增强化学气相沉积(PECVD)可在 Ti-45Al-2Nb-2Mn-1B 上形成厚的硬碳层。脉冲直流等离子体增强化学气相沉积(PECVD)时间少于 2 小时,会在硬碳层下形成 TiC 和 Ti2AlC 化合物的表面夹层。5 至 20 小时后,碳层的形成超过了 TiC 和 Ti2AlC 层的生长,形成了较厚的硬碳层。这可以解释为碳向基合金扩散的速度减慢,导致碳的硬结构在外表面积累。硬碳层的厚度达到了 40 μm,这是用扫描电镜显微镜观察到的。硬碳层外表面的硬度约为 600-1500 HV0.5(5.88-14.71 GPa)。整个表层的 EDX 分析显示,最外层的碳含量为 50-100 %。最外层的碳含量为 50-100 %。碳层的拉曼光谱显示碳的 sp3 (D) 和 sp2 (G) 峰在∼1330 和∼1560 cm-1 处,TiC 峰在∼200 cm-1 处。
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Evolution of hard carbon layers on Ti-45Al-2Nb-2Mn-1B by plasma enhanced chemical vapor deposition of hydrocarbons and hydrogen
Extension of pulsed DC plasma enhanced CVD (PECVD) of carbon from hydrocarbons resulted in thick hard carbon layers on Ti-45Al-2Nb-2Mn-1B. PECVD for less than 2 h led to the formation of surface interlayers of TiC and Ti2AlC compounds under the hard carbon layer. After 5 h until 20 h, the formation of carbons layers surpassed the growth of TiC and Ti2AlC layers and resulted in a thicker hard carbon layer. This can be explained with the deceleration of carbon diffusion into the base alloy that resulted in the accumulation of a hard structure of carbon on the outer surface. The thickness of the hard carbon layers reached up to ∼40 μm, which were revealed using SEM microcopy. The hardness on the outer surface of hard carbon layer was around 600–1500 HV0.5 (5.88–14.71 GPa). EDX analysis across the surface layers showed ∼50–100 at. % carbon on the outermost layers. Raman spectroscopy of carbon layers showed sp3 (D) and sp2 (G) peaks of carbon at ∼1330 and ∼1560 cm−1 and peaks of TiC at ∼200 cm−1 peaks.
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