Ah-Hyun Hong, Yu Jung Park, J. Seo, Yoon Kim, Dong-Wook Park
{"title":"基于对二甲苯-C 的柔性有机薄膜晶体管及其使用 SU-8 钝化技术提高的可靠性","authors":"Ah-Hyun Hong, Yu Jung Park, J. Seo, Yoon Kim, Dong-Wook Park","doi":"10.1116/5.0197032","DOIUrl":null,"url":null,"abstract":"Flexible and biocompatible organic thin-film transistors (OTFTs) can be well-suited for biological applications due to their compatibility with biomaterials. In this study, flexible OTFTs were fabricated with a Parylene-C substrate and gate dielectric, a material known for its flexibility and biocompatibility. We used poly[2,5-bis(3-tetradecylthiophen-2-yl)thieno[3,2-b]thiophene] as organic channel material. To ensure the longevity and protection of the channel, SU-8, known for its biocompatibility and transparency, effectively safeguarded the OTFT and ensured its sustained operation. Flexible OTFTs were affixed to a curved fixture, referred to as a “curved condition.” The device parameters at −20 V of VD in the curved condition shows an Ion/off ratio of 3.5 × 104, threshold voltage (VTH) of −0.42 V, and mobility of 0.003 cm2/V s. The Parylene-C-based OTFT with SU-8 passivation demonstrated reliability by maintaining performance under curved conditions for 40 days. The results show that the proposed device is suitable for flexible electronics and sensor applications.","PeriodicalId":282302,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"101 2","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Parylene-C-based flexible organic thin-film transistors and their reliability improvement using SU-8 passivation\",\"authors\":\"Ah-Hyun Hong, Yu Jung Park, J. Seo, Yoon Kim, Dong-Wook Park\",\"doi\":\"10.1116/5.0197032\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Flexible and biocompatible organic thin-film transistors (OTFTs) can be well-suited for biological applications due to their compatibility with biomaterials. In this study, flexible OTFTs were fabricated with a Parylene-C substrate and gate dielectric, a material known for its flexibility and biocompatibility. We used poly[2,5-bis(3-tetradecylthiophen-2-yl)thieno[3,2-b]thiophene] as organic channel material. To ensure the longevity and protection of the channel, SU-8, known for its biocompatibility and transparency, effectively safeguarded the OTFT and ensured its sustained operation. Flexible OTFTs were affixed to a curved fixture, referred to as a “curved condition.” The device parameters at −20 V of VD in the curved condition shows an Ion/off ratio of 3.5 × 104, threshold voltage (VTH) of −0.42 V, and mobility of 0.003 cm2/V s. The Parylene-C-based OTFT with SU-8 passivation demonstrated reliability by maintaining performance under curved conditions for 40 days. The results show that the proposed device is suitable for flexible electronics and sensor applications.\",\"PeriodicalId\":282302,\"journal\":{\"name\":\"Journal of Vacuum Science & Technology B\",\"volume\":\"101 2\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Vacuum Science & Technology B\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/5.0197032\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology B","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/5.0197032","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Parylene-C-based flexible organic thin-film transistors and their reliability improvement using SU-8 passivation
Flexible and biocompatible organic thin-film transistors (OTFTs) can be well-suited for biological applications due to their compatibility with biomaterials. In this study, flexible OTFTs were fabricated with a Parylene-C substrate and gate dielectric, a material known for its flexibility and biocompatibility. We used poly[2,5-bis(3-tetradecylthiophen-2-yl)thieno[3,2-b]thiophene] as organic channel material. To ensure the longevity and protection of the channel, SU-8, known for its biocompatibility and transparency, effectively safeguarded the OTFT and ensured its sustained operation. Flexible OTFTs were affixed to a curved fixture, referred to as a “curved condition.” The device parameters at −20 V of VD in the curved condition shows an Ion/off ratio of 3.5 × 104, threshold voltage (VTH) of −0.42 V, and mobility of 0.003 cm2/V s. The Parylene-C-based OTFT with SU-8 passivation demonstrated reliability by maintaining performance under curved conditions for 40 days. The results show that the proposed device is suitable for flexible electronics and sensor applications.