基于对二甲苯-C 的柔性有机薄膜晶体管及其使用 SU-8 钝化技术提高的可靠性

Ah-Hyun Hong, Yu Jung Park, J. Seo, Yoon Kim, Dong-Wook Park
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引用次数: 0

摘要

柔性和生物相容性有机薄膜晶体管(OTFT)因其与生物材料的相容性而非常适合生物应用。在这项研究中,我们使用聚对二甲苯-C(Parylene-C)衬底和栅电介质制造了柔性 OTFT,这种材料以其柔性和生物相容性而著称。我们使用聚[2,5-双(3-十四烷基噻吩-2-基)噻吩并[3,2-b]噻吩]作为有机通道材料。为确保通道的寿命和保护,以生物相容性和透明度著称的 SU-8 有效地保护了 OTFT,并确保其持续运行。柔性 OTFT 被固定在弧形夹具上,称为 "弧形条件"。在曲面条件下,-20 V VD 的器件参数显示离子/关断比为 3.5 × 104,阈值电压 (VTH) 为 -0.42 V,迁移率为 0.003 cm2/V s。带有 SU-8 钝化层的基于二甲苯-C 的 OTFT 在弯曲条件下保持性能达 40 天,证明了其可靠性。结果表明,所提出的器件适用于柔性电子和传感器应用。
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Parylene-C-based flexible organic thin-film transistors and their reliability improvement using SU-8 passivation
Flexible and biocompatible organic thin-film transistors (OTFTs) can be well-suited for biological applications due to their compatibility with biomaterials. In this study, flexible OTFTs were fabricated with a Parylene-C substrate and gate dielectric, a material known for its flexibility and biocompatibility. We used poly[2,5-bis(3-tetradecylthiophen-2-yl)thieno[3,2-b]thiophene] as organic channel material. To ensure the longevity and protection of the channel, SU-8, known for its biocompatibility and transparency, effectively safeguarded the OTFT and ensured its sustained operation. Flexible OTFTs were affixed to a curved fixture, referred to as a “curved condition.” The device parameters at −20 V of VD in the curved condition shows an Ion/off ratio of 3.5 × 104, threshold voltage (VTH) of −0.42 V, and mobility of 0.003 cm2/V s. The Parylene-C-based OTFT with SU-8 passivation demonstrated reliability by maintaining performance under curved conditions for 40 days. The results show that the proposed device is suitable for flexible electronics and sensor applications.
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