{"title":"回顾：\"聚焦离子束技术在执行横截面成像、纳米器件层制备、材料纳米图案化和电路编辑等特殊任务方面已变得非常流行\"","authors":"Melina Parker","doi":"10.32388/4e4o01","DOIUrl":null,"url":null,"abstract":"<jats:p/>","PeriodicalId":503632,"journal":{"name":"Qeios","volume":"9 31","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-05-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Review of: \\\"focused ion beam technology has become very popular for performing special tasks such as cross-sectional imaging, preparation of nanodevice layers, nanopatterning of materials, and circuit editing\\\"\",\"authors\":\"Melina Parker\",\"doi\":\"10.32388/4e4o01\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<jats:p/>\",\"PeriodicalId\":503632,\"journal\":{\"name\":\"Qeios\",\"volume\":\"9 31\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-05-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Qeios\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.32388/4e4o01\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Qeios","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.32388/4e4o01","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Review of: "focused ion beam technology has become very popular for performing special tasks such as cross-sectional imaging, preparation of nanodevice layers, nanopatterning of materials, and circuit editing"
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