Refining laser-induced dewetting for bimetallic Au–Pd nanoparticle synthesis on ZnO thin films: Optimizing fluence for substrate integrity

We report the fabrication of metal alloy Au–Pd nanoparticles on semiconductor thin film substrates (ZnO) by laser-induced dewetting. Employing a UV excimer laser, a single pulse was directed onto a three-layer film stack on a glass substrate: glass/ZnO/Au/Pd and glass/ZnO/Pd/Au. We simulated the temperature attained by the thin films enabling the prediction of energy thresholds required for melting the metal films but avoiding modifying the ZnO film. A specific range is reported of the pulse energy conducive to nanoparticle formation and the energy threshold required to modify the ZnO film beneath them. Depending on the pulse energy applied, the mean diameter of the nanoparticles varied from approximately 150 to around 70 nm. Notably, higher fluences resulted in smaller particles but also induced surface cracks in the ZnO film. Additionally, we observed a reduction in nanoparticle size with increased Pd content. Our results show that laser-induced dewetting can produce bimetallic alloy nanoparticles and, at the same time, ensure the preservation of the optical properties of the ZnO film. This approach opens avenues for tailoring material characteristics and expanding the range of applications of metal nanoparticles on semiconductor-based systems.