氮氧等离子体中准二维 MoS2 的表面功能化

IF 0.5 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY Inorganic Materials: Applied Research Pub Date : 2024-06-03 DOI:10.1134/S2075113324700126

D. E. Melezhenko, D. V. Lopaev, Yu. A. Mankelevich, S. A. Khlebnikov, A. A. Solovykh, L. S. Novikov, E. N. Voronina

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引用次数: 0

摘要

摘要通过实验和理论研究氮和氧等离子体对准二维 MoS2 薄膜的影响，以确定表面功能化的主要机制及其对薄膜结构和性能的影响。使用拉曼光谱、光谱椭偏仪、X 射线光电子能谱等对使用自由基和离子处理前后的样品进行了原位诊断。结果表明，氮和氧等离子体对超薄 MoS2 薄膜的影响导致样品的近表面层发生变化，原因是硫被去除，入射原子被纳入所产生的空位中。应用密度泛函理论模拟揭示了 MoS2 单层表面功能化的主要机制，并解释了实验结果。

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Surface Functionalization of Quasi-Two-Dimensional MoS2 in Nitrogen and Oxygen Plasma

The effect of nitrogen and oxygen plasma on quasi-two-dimensional MoS₂ films is studied experimentally and theoretically in order to identify the main mechanisms of surface functionalization and the influence on the structure and on the properties of the films. Diagnostics of samples before and after treatment using radicals and ions is carried out ex situ using Raman spectroscopy, spectroscopic ellipsometry, X‑ray photoelectron spectroscopy, etc. It is shown that the effect of the nitrogen and oxygen plasma on ultrathin MoS₂ films results in modifying the near-surface layers of the samples due to removal of sulfur and incorporation of incident atoms into the resulting vacancies. The simulation of density functional theory is applied to reveal the main mechanisms of surface functionalization in MoS₂ monolayers and to explain the experimental results.

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来源期刊

Inorganic Materials: Applied Research Engineering-Engineering (all)

CiteScore

0.90

自引率

0.00%

发文量

199

期刊介绍： Inorganic Materials: Applied Research contains translations of research articles devoted to applied aspects of inorganic materials. Best articles are selected from four Russian periodicals: Materialovedenie, Perspektivnye Materialy, Fizika i Khimiya Obrabotki Materialov, and Voprosy Materialovedeniya and translated into English. The journal reports recent achievements in materials science: physical and chemical bases of materials science; effects of synergism in composite materials; computer simulations; creation of new materials (including carbon-based materials and ceramics, semiconductors, superconductors, composite materials, polymers, materials for nuclear engineering, materials for aircraft and space engineering, materials for quantum electronics, materials for electronics and optoelectronics, materials for nuclear and thermonuclear power engineering, radiation-hardened materials, materials for use in medicine, etc.); analytical techniques; structure–property relationships; nanostructures and nanotechnologies; advanced technologies; use of hydrogen in structural materials; and economic and environmental issues. The journal also considers engineering issues of materials processing with plasma, high-gradient crystallization, laser technology, and ultrasonic technology. Currently the journal does not accept direct submissions, but submissions to one of the source journals is possible.