用于计算圆柱形管道中气体流速的改进型克努森方程及其验证

Hajime Yoshida
{"title":"用于计算圆柱形管道中气体流速的改进型克努森方程及其验证","authors":"Hajime Yoshida","doi":"10.1116/6.0003581","DOIUrl":null,"url":null,"abstract":"The modified Knudsen equation was developed to calculate the gas flow rate through a cylindrical tube with arbitrary length-to-diameter ratio in any flow regime including molecular flow, viscous laminar flow, turbulent flow, critical flow, subcritical flow, and their intermediates in our laboratory. Here, it is upgraded for better agreement with literature data, and the upgraded version is compared with 83 literature sources including 31 gas flow equations to verify its reliability. For Kn > 10−5, the modified Knudsen equation mostly agrees with the literature data to within 20%, except for orifice flows with pd/pu ≈ 1.","PeriodicalId":282302,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"37 6","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Upgrading of the modified Knudsen equation and its verification for calculating the gas flow rate through cylindrical tubes\",\"authors\":\"Hajime Yoshida\",\"doi\":\"10.1116/6.0003581\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The modified Knudsen equation was developed to calculate the gas flow rate through a cylindrical tube with arbitrary length-to-diameter ratio in any flow regime including molecular flow, viscous laminar flow, turbulent flow, critical flow, subcritical flow, and their intermediates in our laboratory. Here, it is upgraded for better agreement with literature data, and the upgraded version is compared with 83 literature sources including 31 gas flow equations to verify its reliability. For Kn > 10−5, the modified Knudsen equation mostly agrees with the literature data to within 20%, except for orifice flows with pd/pu ≈ 1.\",\"PeriodicalId\":282302,\"journal\":{\"name\":\"Journal of Vacuum Science & Technology B\",\"volume\":\"37 6\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-06-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Vacuum Science & Technology B\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0003581\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology B","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0003581","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

我们的实验室开发了修正的克努森方程,用于计算在任意流态(包括分子流、粘性层流、湍流、临界流、亚临界流及其中间状态)下通过任意长径比圆柱管的气体流速。为了更好地与文献数据保持一致,我们在此对其进行了升级,并将升级版与包括 31 个气体流动方程在内的 83 个文献资料进行了比较,以验证其可靠性。对于 Kn > 10-5,除了 pd/pu ≈ 1 的孔板流外,修正的克努森方程与文献数据的一致性大多在 20% 以内。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Upgrading of the modified Knudsen equation and its verification for calculating the gas flow rate through cylindrical tubes
The modified Knudsen equation was developed to calculate the gas flow rate through a cylindrical tube with arbitrary length-to-diameter ratio in any flow regime including molecular flow, viscous laminar flow, turbulent flow, critical flow, subcritical flow, and their intermediates in our laboratory. Here, it is upgraded for better agreement with literature data, and the upgraded version is compared with 83 literature sources including 31 gas flow equations to verify its reliability. For Kn > 10−5, the modified Knudsen equation mostly agrees with the literature data to within 20%, except for orifice flows with pd/pu ≈ 1.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Carbon nanotube collimator as an vacuum ultraviolet window Comparative study on variable axis lens systems based on tapered deflectors Transferable GeSn ribbon photodetectors for high-speed short-wave infrared photonic applications Upgrading of the modified Knudsen equation and its verification for calculating the gas flow rate through cylindrical tubes Comparison of GeSn alloy films prepared by ion implantation and remote plasma-enhanced chemical vapor deposition methods
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1