利用多能量氦离子注入和飞秒激光烧蚀技术在铒预植入熔融石英上制备平面和脊状波导

{"title":"利用多能量氦离子注入和飞秒激光烧蚀技术在铒预植入熔融石英上制备平面和脊状波导","authors":"Jinhua Zhao, Li Fan, Boyang Li, Wenzhuo Zang, Aijia liu, Jinhua Mao, Yu Yue, Shuang Li, Yicun Yao, Qing-Yang Yue","doi":"10.1364/ao.524545","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":101299,"journal":{"name":"Applied optics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2024-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Planar and Ridged Waveguide Preparation on Erbium Pre-implanted Fused Silica by Multi-energy Helium Ion Implantation and Femtosecond Laser Ablation\",\"authors\":\"Jinhua Zhao, Li Fan, Boyang Li, Wenzhuo Zang, Aijia liu, Jinhua Mao, Yu Yue, Shuang Li, Yicun Yao, Qing-Yang Yue\",\"doi\":\"10.1364/ao.524545\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":101299,\"journal\":{\"name\":\"Applied optics\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-06-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Applied optics\",\"FirstCategoryId\":\"0\",\"ListUrlMain\":\"https://doi.org/10.1364/ao.524545\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied optics","FirstCategoryId":"0","ListUrlMain":"https://doi.org/10.1364/ao.524545","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}