微电极及其与电解质和绝缘体界面的充电电流动力学建模,重点关注 SU-8 基质上的微加工金微带电极

Miguel Angel Abrego Tello, Mahsa Lotfi Marchoubeh, Ingrid Fritsch
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摘要

电化学方法是否适合在微型器件上进行定量测量,受到电极-绝缘体界面与电极面积比相对较大的影响,电解质和导体/绝缘体材料之间的相互作用会极大地影响充电动力学。由此产生的充电电流可能会超过氧化还原化学反应产生的电流。本文研究的器件具有 70 微米×100 微米的电活性窗口,内含金共面微带电极,并由 SU-8 绝缘,SU-8 既是覆盖层又是基底。覆盖层确定了电活性长度,并将电极引线与样品溶液隔离开来。在 0.10 M KCl 溶液中进行循环伏安法测定时,会发现电流与扫描速率之间存在意想不到的非线性关系,这可以用两种经验方法来解释。第一种方法采用等效电路,涉及并联的泄漏电阻和双层电容,以解决背景过程和电极缺陷与扫描速率的函数关系。第二种方法将增强的电流与因界面不规则而变化的可充电区域联系起来。本研究以之前发表的有关导体-绝缘体替代材料的文章为基准。对这些材料进行比较后发现,与玻璃、环氧树脂、氮化硅以及某些情况下的聚酰亚胺和 Tefzel 材料相比,使用 SU-8 材料制造的器件的充电动力学具有更佳的电化学性能。
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Modeling Charging Current Dynamics at Microelectrodes and their Interfaces with Electrolyte and Insulators with a Focus on Microfabricated Gold Microband Electrodes on an SU-8 Substrate
The suitability of electrochemical methods for quantitative measurements at microdevices is influenced by the relatively large electrode-insulator interface-to-electrode area ratio, greatly impacting charging dynamics due to interactions among electrolyte and conductor/insulator materials. The resulting charging current can overwhelm the current from redox chemistry. The device studied here features a 70-µm×100-µm electroactive window, hosts gold coplanar microband electrodes, and is insulated by SU-8, which serves as both overlayer and substrate. The overlayer defines the electroactive length and isolates the leads of the electrodes from the sample solution. Cyclic voltammetry in 0.10 M KCl yields unexpected, nonlinear dependence of current on scan rate, which can be explained with two empirical approaches. The first employs an equivalent circuit, involving leakage resistance and double-layer capacitance in parallel, to address both background processes and electrode imperfections as a function of scan rate. The second associates the enhanced current to a changing-chargeable area resulting from interface irregularities. Prior publications on alternative conductor-insulator materials are benchmarked in this study. The comparison of the materials shows that charging dynamics for devices made with SU-8 lead to more favorable electrochemical performance than for those constructed with glass, epoxy, and silicon nitride, and under certain circumstances, polyimide and Tefzel.
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