Hongwei Liu, Tianyi Zhang, Peng Wu, Hae Won Lee, Zhenjing Liu, Tsz Wing Tang, Shin-Yi Tang, Ting Kang, Ji-Hoon Park, Jun Wang, Kenan Zhang, Xudong Zheng, Yu-Ren Peng, Yu-Lun Chueh, Yuan Liu, Tomás Palacios, Jing Kong* and Zhengtang Luo*,
{"title":"在化学气相沉积过程中通过无氢斜坡促进单层过渡金属二卤化物的生长。","authors":"Hongwei Liu, Tianyi Zhang, Peng Wu, Hae Won Lee, Zhenjing Liu, Tsz Wing Tang, Shin-Yi Tang, Ting Kang, Ji-Hoon Park, Jun Wang, Kenan Zhang, Xudong Zheng, Yu-Ren Peng, Yu-Lun Chueh, Yuan Liu, Tomás Palacios, Jing Kong* and Zhengtang Luo*, ","doi":"10.1021/acs.nanolett.4c01314","DOIUrl":null,"url":null,"abstract":"<p >The controlled vapor-phase synthesis of two-dimensional (2D) transition metal dichalcogenides (TMDs) is essential for functional applications. While chemical vapor deposition (CVD) techniques have been successful for transition metal sulfides, extending these methods to selenides and tellurides often faces challenges due to uncertain roles of hydrogen (H<sub>2</sub>) in their synthesis. Using CVD growth of MoSe<sub>2</sub> as an example, this study illustrates the role of a H<sub>2</sub>-free environment during temperature ramping in suppressing the reduction of MoO<sub>3</sub>, which promotes effective vaporization and selenization of the Mo precursor to form MoSe<sub>2</sub> monolayers with excellent crystal quality. As-synthesized MoSe<sub>2</sub> monolayer-based field-effect transistors show excellent carrier mobility of up to 20.9 cm<sup>2</sup>/(V·s) with an on–off ratio of 7 × 10<sup>7</sup>. This approach can be extended to other TMDs, such as WSe<sub>2</sub>, MoTe<sub>2</sub>, and MoSe<sub>2</sub>/WSe<sub>2</sub> in-plane heterostructures. Our work provides a rational and facile approach to reproducibly synthesize high-quality TMD monolayers, facilitating their translation from laboratory to manufacturing.</p>","PeriodicalId":53,"journal":{"name":"Nano Letters","volume":null,"pages":null},"PeriodicalIF":9.6000,"publicationDate":"2024-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Boosting Monolayer Transition Metal Dichalcogenides Growth by Hydrogen-Free Ramping during Chemical Vapor Deposition\",\"authors\":\"Hongwei Liu, Tianyi Zhang, Peng Wu, Hae Won Lee, Zhenjing Liu, Tsz Wing Tang, Shin-Yi Tang, Ting Kang, Ji-Hoon Park, Jun Wang, Kenan Zhang, Xudong Zheng, Yu-Ren Peng, Yu-Lun Chueh, Yuan Liu, Tomás Palacios, Jing Kong* and Zhengtang Luo*, \",\"doi\":\"10.1021/acs.nanolett.4c01314\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p >The controlled vapor-phase synthesis of two-dimensional (2D) transition metal dichalcogenides (TMDs) is essential for functional applications. While chemical vapor deposition (CVD) techniques have been successful for transition metal sulfides, extending these methods to selenides and tellurides often faces challenges due to uncertain roles of hydrogen (H<sub>2</sub>) in their synthesis. Using CVD growth of MoSe<sub>2</sub> as an example, this study illustrates the role of a H<sub>2</sub>-free environment during temperature ramping in suppressing the reduction of MoO<sub>3</sub>, which promotes effective vaporization and selenization of the Mo precursor to form MoSe<sub>2</sub> monolayers with excellent crystal quality. As-synthesized MoSe<sub>2</sub> monolayer-based field-effect transistors show excellent carrier mobility of up to 20.9 cm<sup>2</sup>/(V·s) with an on–off ratio of 7 × 10<sup>7</sup>. This approach can be extended to other TMDs, such as WSe<sub>2</sub>, MoTe<sub>2</sub>, and MoSe<sub>2</sub>/WSe<sub>2</sub> in-plane heterostructures. Our work provides a rational and facile approach to reproducibly synthesize high-quality TMD monolayers, facilitating their translation from laboratory to manufacturing.</p>\",\"PeriodicalId\":53,\"journal\":{\"name\":\"Nano Letters\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":9.6000,\"publicationDate\":\"2024-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nano Letters\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://pubs.acs.org/doi/10.1021/acs.nanolett.4c01314\",\"RegionNum\":1,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"CHEMISTRY, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nano Letters","FirstCategoryId":"88","ListUrlMain":"https://pubs.acs.org/doi/10.1021/acs.nanolett.4c01314","RegionNum":1,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"CHEMISTRY, MULTIDISCIPLINARY","Score":null,"Total":0}
Boosting Monolayer Transition Metal Dichalcogenides Growth by Hydrogen-Free Ramping during Chemical Vapor Deposition
The controlled vapor-phase synthesis of two-dimensional (2D) transition metal dichalcogenides (TMDs) is essential for functional applications. While chemical vapor deposition (CVD) techniques have been successful for transition metal sulfides, extending these methods to selenides and tellurides often faces challenges due to uncertain roles of hydrogen (H2) in their synthesis. Using CVD growth of MoSe2 as an example, this study illustrates the role of a H2-free environment during temperature ramping in suppressing the reduction of MoO3, which promotes effective vaporization and selenization of the Mo precursor to form MoSe2 monolayers with excellent crystal quality. As-synthesized MoSe2 monolayer-based field-effect transistors show excellent carrier mobility of up to 20.9 cm2/(V·s) with an on–off ratio of 7 × 107. This approach can be extended to other TMDs, such as WSe2, MoTe2, and MoSe2/WSe2 in-plane heterostructures. Our work provides a rational and facile approach to reproducibly synthesize high-quality TMD monolayers, facilitating their translation from laboratory to manufacturing.
期刊介绍:
Nano Letters serves as a dynamic platform for promptly disseminating original results in fundamental, applied, and emerging research across all facets of nanoscience and nanotechnology. A pivotal criterion for inclusion within Nano Letters is the convergence of at least two different areas or disciplines, ensuring a rich interdisciplinary scope. The journal is dedicated to fostering exploration in diverse areas, including:
- Experimental and theoretical findings on physical, chemical, and biological phenomena at the nanoscale
- Synthesis, characterization, and processing of organic, inorganic, polymer, and hybrid nanomaterials through physical, chemical, and biological methodologies
- Modeling and simulation of synthetic, assembly, and interaction processes
- Realization of integrated nanostructures and nano-engineered devices exhibiting advanced performance
- Applications of nanoscale materials in living and environmental systems
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