在对比学习中使用基于轻量级编码器网络的自动数据增强技术改进晶片图缺陷模式分类

IF 5.9 2区 工程技术 Q1 COMPUTER SCIENCE, ARTIFICIAL INTELLIGENCE Journal of Intelligent Manufacturing Pub Date : 2024-07-01 DOI:10.1007/s10845-024-02444-w
Yi Sheng, Jinda Yan, Minghao Piao
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引用次数: 0

摘要

近年来,监督学习一直是晶圆图缺陷模式分类(WM-DPC)的主要方法,需要大量标记数据才能建立有效的模型。然而,收集工业数据具有挑战性,需要大量的人工标注工作,因此既昂贵又耗时。为了克服这些障碍,我们为 WM-DPC 引入了一个基于自动数据增强的对比学习框架。这种创新的扩增方法考虑了各种缺陷类型的区域缺陷密度特征,解决了传统固定数据扩增的局限性,提高了模型的泛化能力。该框架分两个阶段运行。首先,轻量级编码器从未标明的数据中提取丰富的代表性特征。然后,利用有限的标记数据集对分类网络进行微调。使用公开的 WM-811K 数据集进行的实验结果表明,所提出的自动数据增强和轻量级编码器有效地捕捉到了未标记数据中的详细代表性特征,并在使用最少的标记数据进行微调后达到了接近 91% 的平均准确率。
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Improved wafer map defect pattern classification using automatic data augmentation based lightweight encoder network in contrastive learning

In recent years, supervised learning has been the predominant method for wafer map defect pattern classification (WM-DPC), requiring a substantial amount of labeled data to build effective models. Nonetheless, gathering industrial data is challenging and demands significant manual labeling efforts, making it both expensive and time-consuming. To overcome these obstacles, we introduced a contrastive learning framework for WM-DPC based on automatic data augmentation. This innovative augmentation approach takes account of the regional defect density characteristic of various defect types, addressing the limitations of traditional fixed data augmentation and improving the model’s generalization capacity. The framework operates in two phases. At first, a lightweight encoder extracts rich representative features from unlabeled data. Then, the classification network is fine-tuned with a limited labeled data set. Experimental outcomes using the public WM-811K dataset showed that the proposed automatic data augmentation and lightweight encoder effectively captured detailed representative features from unlabeled data, and achieved an average accuracy close to 91% after fine-tuning with minimal labeled data.

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来源期刊
Journal of Intelligent Manufacturing
Journal of Intelligent Manufacturing 工程技术-工程:制造
CiteScore
19.30
自引率
9.60%
发文量
171
审稿时长
5.2 months
期刊介绍: The Journal of Nonlinear Engineering aims to be a platform for sharing original research results in theoretical, experimental, practical, and applied nonlinear phenomena within engineering. It serves as a forum to exchange ideas and applications of nonlinear problems across various engineering disciplines. Articles are considered for publication if they explore nonlinearities in engineering systems, offering realistic mathematical modeling, utilizing nonlinearity for new designs, stabilizing systems, understanding system behavior through nonlinearity, optimizing systems based on nonlinear interactions, and developing algorithms to harness and leverage nonlinear elements.
期刊最新文献
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