基于 SiNWFET 的尿酸酶和 ChOX 生物传感器周围三重混合栅优化介质调制无结栅的数值建模

Rishu Chaujar, Mekonnen Getnet Yirak
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摘要

在本手稿中,针对基于 FET 的尿酸酶和 ChOX 生物传感器,采用 40 nm 技术(20 nm 栅极长度)开发了一个基于电场、阈值电压、阈下电流和静电势的圆柱坐标数值模型,并使用泊松方程计算了三重混合金属(THM)栅极电介质调制无结硅纳米线栅极,以研究不同栅极工程优化对拟议器件性能的影响。ATLAS-3D TCAD "器件模拟器的结果与推导出的分析模型一致。三种栅极优化(栅极工程)类型分别用 Mj(4.86、4.96 和 4.50 eV)、Oj(4.96、4.86 和 4.50 eV)和 Qj(4.86、4.50 和 4.我们在纳米空腔中涂覆了尿酸酶和胆固醇氧化酶(ChOX)等生物大分子,以确定它们对器件性能的影响。我们的研究结果表明,涂有 ChOX 电介质并在 "O "处优化了可调功函数的纳米空腔在器件灵敏度、移位阈值电压、开关比、跨导、本征电压增益和器件效率方面都有更好的输出结果。例如,在 ChOX 生物分子的情况下,M、O 和 Q 栅极优化后的开关比分别为 5.22 × 105、1.36 × 106 和 2.18 × 104。我们的结论是,在 "O "栅优化栅极功函数的器件为未来超大规模集成(ULSI)的发展提供了新的机遇,可实现高效的器件性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

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Numerical modelling for triple hybrid gate optimization dielectric modulated junctionless gate all around SiNWFET based uricase and ChOX biosensor

In this manuscript, a numerical model based on the electric field, threshold voltage, sub-threshold current, and electrostatic potential in cylindrical coordinates using Poisson’s equation for triple hybrid metal (THM) gate dielectric modulated junctionless silicon-nanowire gate all around FET based uricase and ChOX biosensor was developed at 40 nm technology (20 nm gate length) to study different gate engineering optimization effects on the performance of the proposed device. The results of the ATLAS-3D TCAD" device simulator agreed with a derived analytical model. Three types of gate optimization (gate engineering) are denoted by Mϕ (4.86, 4.96 and 4.50 eV), Oϕ (4.96, 4.86 and 4.50 eV), and Qϕ (4.86, 4.50 and 4.96 eV) each have three different metal work-function, including uricase and cholesterol oxidase (ChOX) biomolecules have been coated in the nanocavity to determine their impact on the device performance and also, the effect of nanogap cavity length on the proposed device was examined taking numerous simulations. Our findings conclude that nanocavity coated with ChOX dielectric and having tunable work-function optimized at “O” signifies better output results in the device sensitivity, shifting threshold voltage, switching ratio, transconductance, intrinsic voltage gain, and device efficiency. For instance, the switching ratio in the case of ChOX biomolecule for M, O, and Q gate optimizations are 5.22 × 105, 1.36 × 106, and 2.18 × 104, respectively. We conclude that the proposed devices with optimizing gate work function at “O” suggest new opportunities for future ultra-large-scale integration (ULSI) development to achieve highly efficient device performance.

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