全面分析全耗尽和部分耗尽硅绝缘体场效应晶体管器件

P. Harika, KGirija Sravani, G. Shanthi, M. D. Bismil Jaffery, K. Rohith Sai, Sk. Shoukath Vali
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摘要

本研究论文探讨了部分耗尽型绝缘体上硅 (PDSOI) MOSFET 和完全耗尽型绝缘体上硅 (FDSOI) MOSFET 的设计和分析。本文全面分析了 PDSOI 和 FDSOI MOSFET 的直流和射频参数。研究涉及不同的表面硅厚度、源极/漏极掺杂水平、栅极金属功函数、箱体氧化物厚度、栅极氧化物厚度和沟道长度调制。通过研究这些不同的器件参数,本文旨在深入了解 PDSOI 和 FDSOI MOSFET 的性能特征及其在集成电路中的不同应用的适用性。这些发现有助于更好地理解器件优化,并为半导体技术的未来发展提供指导。本研究使用 SILVACO TCAD 工具进行各方面的设计和分析。对 PDSOI 器件中的浮体及其相关扭结效应进行了深入研究。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

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Comprehensive analysis of fully depleted and partially depleted silicon-on-insulator FET device

This research paper explores the design and analysis of partially depleted silicon on insulator (PDSOI) MOSFET and fully depleted silicon on insulator (FDSOI) MOSFET. This paper presents a comprehensive analysis of both DC and RF parameters in PDSOI and FDSOI MOSFETs. The investigation involves varying surface silicon thickness, source/drain doping levels, gate metal work functions, box oxide thickness, gate oxide thickness, and channel length modulation. By studying these diverse device parameters, the paper aims to gain insights into the performance characteristics of PDSOI and FDSOI MOSFETs and their suitability for different applications in integrated circuits. The findings contribute to a better understanding of device optimization and guide future advancements in semiconductor technology. The SILVACO TCAD tool is utilized for all aspects of design and analysis in this study. A thorough investigation is conducted on the floating body and its associated kink effects in a PDSOI device.

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