栅辅助磁控溅射法在不同磁场配置下沉积的铝薄膜的形貌

IF 1.5 4区物理与天体物理 Q2 PHYSICS, MULTIDISCIPLINARY Brazilian Journal of Physics Pub Date : 2024-06-26 DOI:10.1007/s13538-024-01539-2

D. A. Duarte, J. C. Sagás, K. Grigorov

{"title":"栅辅助磁控溅射法在不同磁场配置下沉积的铝薄膜的形貌","authors":"D. A. Duarte, J. C. Sagás, K. Grigorov","doi":"10.1007/s13538-024-01539-2","DOIUrl":null,"url":null,"abstract":"<p>Aluminum thin films were deposited by unbalanced grid-assisted magnetron sputtering. Depositions were made with different net charges of the particles bombarding the substrate through modifications in the magnetic field with the aid of permanent and electro magnets. Film morphology was evaluated by atomic force microscopy and the results point out that the surface roughness of the film deposited with net positive ions bombardment is about five times higher than the surface roughness obtained with net electrons bombardment and ten times higher than that obtained with neutral net charge bombardment.</p>","PeriodicalId":499,"journal":{"name":"Brazilian Journal of Physics","volume":null,"pages":null},"PeriodicalIF":1.5000,"publicationDate":"2024-06-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Morphology of Al Thin Films Deposited Under Different Magnetic Field Configurations by Grid-assisted Magnetron Sputtering\",\"authors\":\"D. A. Duarte, J. C. Sagás, K. Grigorov\",\"doi\":\"10.1007/s13538-024-01539-2\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>Aluminum thin films were deposited by unbalanced grid-assisted magnetron sputtering. Depositions were made with different net charges of the particles bombarding the substrate through modifications in the magnetic field with the aid of permanent and electro magnets. Film morphology was evaluated by atomic force microscopy and the results point out that the surface roughness of the film deposited with net positive ions bombardment is about five times higher than the surface roughness obtained with net electrons bombardment and ten times higher than that obtained with neutral net charge bombardment.</p>\",\"PeriodicalId\":499,\"journal\":{\"name\":\"Brazilian Journal of Physics\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":1.5000,\"publicationDate\":\"2024-06-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Brazilian Journal of Physics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1007/s13538-024-01539-2\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"PHYSICS, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Brazilian Journal of Physics","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1007/s13538-024-01539-2","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"PHYSICS, MULTIDISCIPLINARY","Score":null,"Total":0}

引用次数: 0

摘要

铝薄膜是通过不平衡栅辅助磁控溅射法沉积的。在永久磁铁和电子磁铁的帮助下，通过改变磁场，以不同的粒子净电荷轰击基底进行沉积。用原子力显微镜对薄膜形态进行了评估，结果表明，用正离子净轰击沉积的薄膜表面粗糙度比用电子净轰击沉积的表面粗糙度高五倍，比用中性净电荷轰击沉积的表面粗糙度高十倍。

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Morphology of Al Thin Films Deposited Under Different Magnetic Field Configurations by Grid-assisted Magnetron Sputtering

Aluminum thin films were deposited by unbalanced grid-assisted magnetron sputtering. Depositions were made with different net charges of the particles bombarding the substrate through modifications in the magnetic field with the aid of permanent and electro magnets. Film morphology was evaluated by atomic force microscopy and the results point out that the surface roughness of the film deposited with net positive ions bombardment is about five times higher than the surface roughness obtained with net electrons bombardment and ten times higher than that obtained with neutral net charge bombardment.

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来源期刊

Brazilian Journal of Physics 物理-物理：综合

CiteScore

2.50

自引率

6.20%

发文量

189

审稿时长

6.0 months

期刊介绍： The Brazilian Journal of Physics is a peer-reviewed international journal published by the Brazilian Physical Society (SBF). The journal publishes new and original research results from all areas of physics, obtained in Brazil and from anywhere else in the world. Contents include theoretical, practical and experimental papers as well as high-quality review papers. Submissions should follow the generally accepted structure for journal articles with basic elements: title, abstract, introduction, results, conclusions, and references.