不同基底上的氧化锡镓外延层:光学和成分分析

IF 1.5 4区 物理与天体物理 Q3 PHYSICS, CONDENSED MATTER Physica Status Solidi B-basic Solid State Physics Pub Date : 2024-07-02 DOI:10.1002/pssb.202400137
Daniel. A. Hunter, Gunasekar Naresh‐Kumar, Paul R. Edwards, Olha Makydonska, Fabien C. P. Massabuau, Isa Hatipoglu, Partha Mukhopadhyay, Winston V. Schoenfeld, Robert W. Martin
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引用次数: 0

摘要

利用电子束技术分析了衬底选择和生长参数对等离子体辅助分子束外延生长的锡镓氧化物[(SnxGa1-x)2O3]薄膜的成分和光学特性的影响。研究发现,锡的掺入量和薄膜质量与生长温度和基底材料(硅、蓝宝石和块状 Ga2O3)有很大关系,合金浓度的 x 值最高可达 0.11。室温阴极发光光谱显示,锡合金化抑制了紫外线(3.3-3.0 eV),增强了蓝光(2.8-2.4 eV),并产生了绿光(2.4-2.0 eV),这表明引入了高密度的镓空位(VGa)和随后的 VGa-Sn 复合物。通过绘制横截面上的成分和发光图,我们进一步分析了这种行为。与 Ga2O3 相比,由于带隙减小,光谱带出现了明显的重移,这一点通过光学透射测量得到了证实。研究结果表明,通过锡合金化可以成功地降低氧化镓的带隙,并将其用于紫外光电子器件的带隙工程。
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Tin Gallium Oxide Epilayers on Different Substrates: Optical and Compositional Analysis
Electron beam techniques have been used to analyze the impact of substrate choice and growth parameters on the compositional and optical properties of tin gallium oxide [(SnxGa1−x)2O3] thin films grown by plasma‐assisted molecular beam epitaxy. Sn incorporation and film quality are found to be highly dependent on growth temperature and substrate material (silicon, sapphire, and bulk Ga2O3) with alloy concentrations varying up to an x value of 0.11. Room temperature cathodoluminescence spectra show the Sn alloying suppressing UV (3.3–3.0 eV), enhancing blue (2.8–2.4 eV), and generating green (2.4–2.0 eV) emission, indicative of the introduction of a high density of gallium vacancies (VGa) and subsequent VGa–Sn complexes. This behavior was further analyzed by mapping composition and luminescence across a cross section. Compared to Ga2O3, the spectral bands show a clear redshift due to bandgap reduction, confirmed by optical transmission measurements. The results show promise that the bandgap of gallium oxide can successfully be reduced through Sn alloying and used for bandgap engineering within UV optoelectronic devices.
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来源期刊
Physica Status Solidi B-basic Solid State Physics
Physica Status Solidi B-basic Solid State Physics 物理-物理:凝聚态物理
CiteScore
3.30
自引率
6.20%
发文量
321
审稿时长
2 months
期刊介绍: physica status solidi is devoted to the thorough peer review and the rapid publication of new and important results in all fields of solid state and materials physics, from basic science to applications and devices. Being among the largest and most important international publications, the pss journals publish review articles, letters and original work as well as special issues and conference contributions. physica status solidi b – basic solid state physics is devoted to topics such as theoretical and experimental investigations of the atomistic and electronic structure of solids in general, phase transitions, electronic and optical properties of low-dimensional, nano-scale, strongly correlated, or disordered systems, superconductivity, magnetism, ferroelectricity etc.
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