用于半导体器件静电放电鲁棒性测试的传输线脉冲设置

IF 0.4 4区工程技术 Q4 ENGINEERING, MULTIDISCIPLINARY Instruments and Experimental Techniques Pub Date : 2024-07-08 DOI:10.1134/s0020441224700453

V. V. Kuznetsov, V. V. Andreev

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引用次数: 0

摘要

摘要介绍了一种独创的传输线脉冲装置。该测试装置可测量半导体器件的准静态 I-V 曲线和静电放电保护，并研究集成电路的静电放电鲁棒性。该装置可进行破坏性和非破坏性测试。根据 IEC62615 国际标准，所设计的测试装置可使用 100 ns 脉冲执行传输线脉冲测试，电流峰值可达 10 A。

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Transmission Line Pulse Setup for Electrostatic Discharge Robustness Testing of the Semiconductor Devices

Abstract

An original transmission line pulse setup has been presented. This test setup allows to measure quasi-static I–V curves of the semiconductor devices and electrostatic discharge protection and investigate the electrostatic discharge robustness of the integrated circuits. The setup allows to perform both destructive and nondestructive tests. The designed test setup allows to perform transmission line pulse test using 100 ns pulse with current peak value up to 10 A according to the IEC62615 international standard.

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来源期刊

Instruments and Experimental Techniques 工程技术-工程：综合

CiteScore

1.20

自引率

33.30%

发文量

113

审稿时长

4-8 weeks

期刊介绍： Instruments and Experimental Techniques is an international peer reviewed journal that publishes reviews describing advanced methods for physical measurements and techniques and original articles that present techniques for physical measurements, principles of operation, design, methods of application, and analysis of the operation of physical instruments used in all fields of experimental physics and when conducting measurements using physical methods and instruments in astronomy, natural sciences, chemistry, biology, medicine, and ecology.