利用用于光刻照明系统的新型指阵校正照明场均匀性

IF 2.1 4区物理与天体物理 Q2 OPTICS Photonics Pub Date : 2024-07-15 DOI:10.3390/photonics11070661

Shaoqin Luo, Junbo Liu, Chuan Jin, Ji Zhou

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引用次数: 0

摘要

为了校正平版印刷照明场的综合不均匀性，提出了一种先进平版印刷照明系统的高精度均匀性校正方法。该方法采用不透明指阵结构，在不改变每个单元宽度的情况下，通过优化单元的排列和结构，提高了校正能力和精度。校正精度用校正后综合不均匀度的百分比表示。通过理论分析和仿真可以看出，交错指阵的校正精度优于 0.22%。当交错分层时，指阵的校正精度优于 0.14%，优于非分层指阵。当交错、分层并对每个单元进行倒角处理时，手指阵列结构的校正精度优于 0.12%。

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Illumination Field Uniformity Correction by Novel Finger Arrays for Lithography Illumination System

In order to correct the integrated nonuniformity of a lithographic illumination field, a high-precision uniformity correction method for an advanced lithographic illumination system is proposed. The method adopts the opaque finger array structure and improves correction ability and accuracy by optimizing the arrangement and structure of the unit without changing the width of each unit. The correction accuracy is expressed as the percentage of the corrected integrated nonuniformity. Through theoretical analysis and simulation, it can be seen that the correction accuracy of a staggered finger array is better than 0.22%. When staggered and layered, the correction accuracy of a finger array is better than 0.14%, which is better than that of a non-layered finger array. When staggered, layered, and chamfered of each unit, the correction accuracy of the finger array structure is better than 0.12%.

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来源期刊

Photonics Physics and Astronomy-Instrumentation

CiteScore

2.60

自引率

20.80%

发文量

817

审稿时长

8 weeks

期刊介绍： Photonics (ISSN 2304-6732) aims at a fast turn around time for peer-reviewing manuscripts and producing accepted articles. The online-only and open access nature of the journal will allow for a speedy and wide circulation of your research as well as review articles. We aim at establishing Photonics as a leading venue for publishing high impact fundamental research but also applications of optics and photonics. The journal particularly welcomes both theoretical (simulation) and experimental research. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced. Electronic files and software regarding the full details of the calculation and experimental procedure, if unable to be published in a normal way, can be deposited as supplementary material.