{"title":"沉积温度对多孔非晶碳化硅薄膜光学特性的影响","authors":"Jixiang Xu, Weijie Tao, Canhui Liu, Haoyao Xu, Lixuan Li, Zhenhua He","doi":"10.1007/s11595-024-2944-0","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":17657,"journal":{"name":"Journal of Wuhan University of Technology-Mater. Sci. Ed.","volume":" 7","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-07-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Effect of Deposition Temperature on Optical Properties of Porous Amorphous SiC Film\",\"authors\":\"Jixiang Xu, Weijie Tao, Canhui Liu, Haoyao Xu, Lixuan Li, Zhenhua He\",\"doi\":\"10.1007/s11595-024-2944-0\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":17657,\"journal\":{\"name\":\"Journal of Wuhan University of Technology-Mater. Sci. Ed.\",\"volume\":\" 7\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-07-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Wuhan University of Technology-Mater. Sci. Ed.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1007/s11595-024-2944-0\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Wuhan University of Technology-Mater. Sci. Ed.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/s11595-024-2944-0","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}