{"title":"设计用于可见光光刻技术的全息聚光透镜","authors":"Shweta Yadav, Rashmi Sinha, Nirmalendu Deo, Vijay Nath","doi":"10.1080/03772063.2024.2368634","DOIUrl":null,"url":null,"abstract":"Photolithography with visible light at λ = 405 nm utilizing the concept of nonlinear saturable absorption effect where the size of the spot is diminished to the nanometer scale as proposed by sever...","PeriodicalId":50375,"journal":{"name":"IETE Journal of Research","volume":null,"pages":null},"PeriodicalIF":1.3000,"publicationDate":"2024-06-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Design of Holographic Condenser Lens for Visible Light Lithography\",\"authors\":\"Shweta Yadav, Rashmi Sinha, Nirmalendu Deo, Vijay Nath\",\"doi\":\"10.1080/03772063.2024.2368634\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Photolithography with visible light at λ = 405 nm utilizing the concept of nonlinear saturable absorption effect where the size of the spot is diminished to the nanometer scale as proposed by sever...\",\"PeriodicalId\":50375,\"journal\":{\"name\":\"IETE Journal of Research\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":1.3000,\"publicationDate\":\"2024-06-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IETE Journal of Research\",\"FirstCategoryId\":\"94\",\"ListUrlMain\":\"https://doi.org/10.1080/03772063.2024.2368634\",\"RegionNum\":4,\"RegionCategory\":\"计算机科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IETE Journal of Research","FirstCategoryId":"94","ListUrlMain":"https://doi.org/10.1080/03772063.2024.2368634","RegionNum":4,"RegionCategory":"计算机科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Design of Holographic Condenser Lens for Visible Light Lithography
Photolithography with visible light at λ = 405 nm utilizing the concept of nonlinear saturable absorption effect where the size of the spot is diminished to the nanometer scale as proposed by sever...
期刊介绍：
IETE Journal of Research is a Bimonthly journal published by the Institution of Electronics and Telecommunication Engineers (IETE), India. It publishes scientific and technical papers describing original research work or novel product/process development. Occasionally special issues are brought out on new and emerging research areas.
IETE Journal of Research is useful to researchers, engineers, scientists, teachers, managers and students who are interested in keeping a track of original research and development work being carried out in the broad area of electronics, telecommunications, computer science and engineering and information technology.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
