研究通过直流磁控反应溅射制造的 p-NiO/n-SnO2 双层异质结中的二极行为

Shermin Adline, Prashant Bhat, D. Kekuda
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摘要

通过反应式直流磁控溅射法在玻璃基底上沉积了不同氧气流速的氧化锡(SnOx)薄膜和氧化镍(NiO)薄膜。研究了沉积薄膜的结构、化学、形态、光学和电学特性。XRD 研究证实,沉积薄膜具有多晶性质。氧化锡薄膜显示出两相,如氧化锡和二氧化锡。原子力显微镜(AFM)和扫描电子显微镜(SEM)被用来分析薄膜的形貌,而电子显微镜(EDS)则证实了在相应的薄膜中存在锡和镍。X 射线光电子能谱检查显示,溅射的 SnOx 薄膜含有 Sn2+ 和 Sn4+ 两种氧化态,而 NiO 薄膜含有 Ni+2 和 Ni+3 两种氧化态。光致发光研究显示,SnOx 薄膜有强紫光和弱红光发射峰,NiO 则在橙红区域有强发射峰。光学结果表明薄膜是透明的。氧化锡和氧化镍样品的带隙分别为 ~ 3.3 eV 和 - 3.42 eV。此外,我们还构建了一个 p-NiO/n-SnO2 异质结二极管,并对其电气特性进行了全面评估。通过暗电流-电压测量,我们确定了饱和电流、意向系数和势垒高度等电气特性。氧气流速的增加导致了器件整流的降低。我们的研究结果支持为光电设备制造高性能金属氧化物异质结。
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Investigation of diodic behavior in p-NiO/n-SnO2 bilayer heterojunctions fabricated via DC magnetron reactive sputtering
Tin oxide (SnOx) thin films at varying oxygen flow rates and Nickel oxide (NiO) thin films were deposited by reactive dc magnetron sputtering on glass substrates. Structural, chemical, morphological, optical and electrical properties of the deposited films were studied. XRD studies confirmed that the deposited films were polycrystalline in nature. SnOx thin films have shown two phases such as SnO and SnO2. AFM and SEM were used to analyse the morphology of the films and EDS confirmed the presence of Sn and Ni in the respective films. The examination of the X-ray photoelectron spectrum showed that the sputtered SnOx films contain both Sn2+ and Sn4+ oxidation states and NiO films contain Ni+2 and Ni+3 oxidation states. Photoluminescence study shows strong violet and weak red emission peaks for SnOx films and NiO showed strong emission peaks in the orange-red region. The optical results demonstrate that the films were transparent. The bandgap of SnOx and NiO samples were ~ 3.3 eV and- 3.42 eV, respectively. Further we constructed a p-NiO/n-SnO2 heterojunction diode and its electrical characteristics were thoroughly assessed. Using dark current-voltage measurements, electrical characteristics such saturation current, ideality factor and barrier height were determined. The increase in oxygen flow rate led to reduction in the rectification of the devices. Our findings support the creation of high-performance metal oxide heterojunction for optoelectronic devices.
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