{"title":"通过填充再分布层操纵低纵横比电镀铜中的吸附配置","authors":"Zhen-Jia Peng, Zhe Li, Yu Jiao, Ning Zhang, Qi Zhang, Binbin Zhou, Li-Yin Gao, Xian-Zhu Fu, Zhi-Quan Liu, Rong Sun","doi":"10.1016/j.nanoms.2024.07.001","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":501090,"journal":{"name":"Nano Materials Science","volume":"6 5","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Manipulating adsorbate configurations in copper electroplated low aspect-ratio via fill in redistribution layers\",\"authors\":\"Zhen-Jia Peng, Zhe Li, Yu Jiao, Ning Zhang, Qi Zhang, Binbin Zhou, Li-Yin Gao, Xian-Zhu Fu, Zhi-Quan Liu, Rong Sun\",\"doi\":\"10.1016/j.nanoms.2024.07.001\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":501090,\"journal\":{\"name\":\"Nano Materials Science\",\"volume\":\"6 5\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nano Materials Science\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1016/j.nanoms.2024.07.001\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nano Materials Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/j.nanoms.2024.07.001","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0