利用基于机器视觉的针孔点衍射干涉仪测试镜面精密校准系统

Jiasheng Lu, Bing Li, Zhuo Zhao, Leqi Geng
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引用次数: 0

摘要

在针孔点衍射干涉仪(PPDI)中,被测元件的反射点与针孔之间的正确对准对于获得精确的干涉图至关重要。目前,调整倾斜误差需要手动操作,而离焦误差则无法纠正。这些限制妨碍了 PPDI 的仪器操作过程。为解决这一问题,拟议的测试镜对准系统利用衍射理论分析了测试镜反射光束和针孔不对准造成的数学误差。根据具体要求,设计了基于机器视觉的对准系统。该系统包含一个带变焦镜头的 CCD 相机、一个带针孔基板的经典 PPDI(基板上有一个光刻标记)以及一个用于安装被测镜子的 3-DOF 步进电机调节架。此外,还应用了图像处理算法和步进电机驱动程序来实现精确对准。系统实现和实验结果表明,倾斜误差得到了很好的控制,实现了离焦误差修正,使干涉图采集过程更加方便。从结果来看,该系统为 PPDI 的测试镜校准提供了理想的精度和效率。
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Tested mirror precision alignment system using a pinhole point diffraction interferometer based on machine vision
In the pinhole point diffraction interferometer (PPDI), proper alignment between the reflection spot of the tested component and the pinhole is critical to obtain accurate interferograms. At present, adjusting for tilt error requires manual manipulation, and defocus error cannot be corrected. These limitations impede the instrumentation process of PPDI. To address this issue, the proposed tested mirror alignment system utilizes diffraction theory to analyze the mathematical error caused by the misalignment of the tested mirror’s reflected beam and pinhole. An alignment system based on machine vision was designed according to specific requirements. This system incorporates a CCD camera with a zoom lens, the classic PPDI with a pinhole substrate containing a lithography-made mark, and a 3-DOF stepper motor adjusting frame to mount the tested mirror. Additionally, image processing algorithms and step motor driving programs were applied to achieve precise alignment. The system implementation and experimental results indicated that the tilt errors are well-controlled, achieving the defocus error modification, making the interferogram acquisition process more convenient. From the results, this system offers desirable precision and efficiency for PPDI’s tested mirror alignment.
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