高效大规模制造高密度、超低损耗 Si₃N₄ 光电集成电路

IF 8.4 1区 物理与天体物理 Q1 OPTICS Optica Pub Date : 2024-08-08 DOI:10.1364/optica.529673
Xinru Ji, R. N. Wang, Yang Liu, J. Riemensberger, Zheru Qiu, T. Kippenberg
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Efficient mass manufacturing of high-density, ultralow-loss Si₃N₄ photonic integrated circuits
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来源期刊
Optica
Optica OPTICS-
CiteScore
19.70
自引率
2.90%
发文量
191
审稿时长
2 months
期刊介绍: Optica is an open access, online-only journal published monthly by Optica Publishing Group. It is dedicated to the rapid dissemination of high-impact peer-reviewed research in the field of optics and photonics. The journal provides a forum for theoretical or experimental, fundamental or applied research to be swiftly accessed by the international community. Optica is abstracted and indexed in Chemical Abstracts Service, Current Contents/Physical, Chemical & Earth Sciences, and Science Citation Index Expanded.
期刊最新文献
Integrated chirped photonic-crystal cavities in gallium phosphide for broadband soliton generation Space-time Fourier Ptychography for in vivo Quantitative Phase Imaging Efficient mass manufacturing of high-density, ultralow-loss Si₃N₄ photonic integrated circuits Impact of magnetic field of laser on optical trapping HETERODYNE COHERENT DETECTION OF THE ELECTRIC FIELD TEMPORAL TRACE EMITTED BY FREQUENCY MODULATED COMB LASERS
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