超短脉冲激光在α-石英中形成光波导的机理

IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Cirp Annals-Manufacturing Technology Pub Date : 2024-01-01 DOI:10.1016/j.cirp.2024.04.077
Reina Yoshizaki , Tomohiro Fukui , Masayuki Nakao (1)
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引用次数: 0

摘要

光波导对集成光路的开发至关重要。本研究利用超短脉冲激光直写技术研究了介电材料中波导的形成。在强调加工参数对写入低损耗波导的重要性的同时,我们通过对内部改性的现场观察以及对电子密度和折射率变化的详细分析,探索了其基本机制。结合使用泵浦探针成像和马赫-泽恩德干涉测量法,我们揭示了激光在石英中诱导改性的动态过程,突出了空间重叠和照射间距的影响。我们的研究深入揭示了影响波导整体性能的微观现象,从而提供了更先进的制造方法。
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Formation mechanism of optical waveguide in α-Quartz by ultrashort pulse laser

Optical waveguides are crucial in the development of integrated optical circuits. This study examines their formation in dielectric materials using ultrashort pulse laser direct writing. Emphasizing the significance of the processing parameters for writing low-loss waveguides, we explored the underlying mechanisms through in situ observations of internal modifications and a detailed analysis of electron density and refractive index changes. Employing a combination of pump-probe imaging and Mach-Zehnder interferometry, we reveal the dynamics of laser-induced modifications in quartz, highlighting the influence of spatial overlap and irradiation spacing. Our research offers insights into the micro-level phenomena that affect the overall waveguide performance, thereby providing enhanced fabrication methods.

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来源期刊
Cirp Annals-Manufacturing Technology
Cirp Annals-Manufacturing Technology 工程技术-工程:工业
CiteScore
7.50
自引率
9.80%
发文量
137
审稿时长
13.5 months
期刊介绍: CIRP, The International Academy for Production Engineering, was founded in 1951 to promote, by scientific research, the development of all aspects of manufacturing technology covering the optimization, control and management of processes, machines and systems. This biannual ISI cited journal contains approximately 140 refereed technical and keynote papers. Subject areas covered include: Assembly, Cutting, Design, Electro-Physical and Chemical Processes, Forming, Abrasive processes, Surfaces, Machines, Production Systems and Organizations, Precision Engineering and Metrology, Life-Cycle Engineering, Microsystems Technology (MST), Nanotechnology.
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