使用无 ITO 电致变色薄膜制造热镜

Q3 Physics and Astronomy Results in Optics Pub Date : 2024-07-01 DOI:10.1016/j.rio.2024.100735
Chao-Te Lee , Hung-Pin Chen , Wei-Chun Chen , Jing-Han Xie , Cheng-Chung Jaing
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引用次数: 0

摘要

本研究使用射频磁控反应溅射系统,在室温下将 WO3/Ag/W/WO3 (WAWW) 薄膜沉积在 B270 玻璃基板上,该基板由 W 和 Ag 靶材制成。通过椭偏仪、四点探针和分光光度计研究了薄钨中间层对 WAWW 层结构的电学和光学特性的影响。结果表明,薄钨中间层能有效防止银膜氧化。WAWW 薄膜具有介电-金属-介电(DMD)层状结构,具有良好的导电性和较高的可见光透射率。钨层厚度不超过 2 纳米。WO3(29.5 nm)/Ag(14.2 nm)/W(2 nm)/WO3(68.6 nm) 薄膜的薄层电阻和透光率分别为 4.64 Ω/sq 和 65.4 %。在 WAWW 四层结构的基础上,在 B270 玻璃基板上沉积的叠层 WO3(29.5 nm)/Ag(14.2 nm)/W(2 nm)/WO3(68.6 nm)/Ag(16.9 nm)/W(2 nm)/WO3(30.4 nm) 七层结构被用于无 ITO 电致变色和热镜应用。漂白 WAWW 七层结构的可见光(400-700 纳米)和近红外(700-1200 纳米)透过率分别为 71.5% 和 9.9%。有色 WAWW 七层结构的可见光透射率为 23.6%。最后,利用双层 WAWW 薄膜获得了一种无 ITO 的 WAWW 七层结构,具有良好的电致变色和光学性能。
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Fabrication of a hot mirror using ITO-free electrochromic films

In this study, WO3/Ag/W/WO3 (WAWW) films were deposited at room temperature on a B270 glass substrate from W and Ag targets using a radiofrequency magnetron reactive sputtering system. The influence of the thin tungsten interlayer on the electrical and optical properties of the WAWW layer structure was investigated through ellipsometry, a four-point probe and a spectrophotometer. It was determined that the thin tungsten interlayer effectively prevented the oxidation of the silver film. The WAWW film had a dielectric-metal-dielectric (DMD) layered structure with good electrical conductivity and high visible transmittance. The tungsten layer was no more than 2-nm thick. The sheet resistance and luminous transmittance of the WO3(29.5 nm)/Ag(14.2 nm)/W(2 nm)/WO3(68.6 nm) film were 4.64 Ω/sq and 65.4 %, respectively. Based on the WAWW four-layer structure, stacked WO3(29.5 nm)/Ag(14.2 nm)/W(2 nm)/WO3(68.6 nm)/Ag(16.9 nm)/W(2 nm)/WO3(30.4 nm) seven-layer structures deposited on B270 glass substrates were used for both ITO-free electrochromic and hot mirror applications. The visible (400–700 nm) and NIR (700–1200 nm) transmittance values of the bleached WAWW seven-layer structure were 71.5 % and 9.9 %, respectively. The visible transmittance of the colored WAWW seven-layer structure was 23.6 %. Finally, the bi-layer WAWW films were used to obtain an ITO-free WAWW seven-layer structure with a good electrochromic and optical performance.

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来源期刊
Results in Optics
Results in Optics Physics and Astronomy-Atomic and Molecular Physics, and Optics
CiteScore
2.50
自引率
0.00%
发文量
115
审稿时长
71 days
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