L. M. Ledo Pereda, V. N. Semenov, V. S. Rikhvitsky, A. N. Likhachev, R. Sh. Isaev, I. A. Chepurchenko, A. S. Doroshkevich, V. A. Alexandrov
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A proton beam scanning system for silicon sample irradiation has been developed in the frame of the EG-5 accelerator upgrade project and joint work with Micron JSC and Angstrom JSC located in Zelenograd. Together with employees of SPE ESTO JSC (Zelenograd), an automated system has been developed, produced, and tested on the basis of the EG-5 electrostatic accelerator to carry out the technological operation of ion implantation of silicon wafers for the production of power electronics. The developed system is an experimental platform that allows varying the distribution of the sample surface coating during scanning with accelerated particles.
期刊介绍:
The journal Physics of Particles and Nuclei Letters, brief name Particles and Nuclei Letters, publishes the articles with results of the original theoretical, experimental, scientific-technical, methodological and applied research. Subject matter of articles covers: theoretical physics, elementary particle physics, relativistic nuclear physics, nuclear physics and related problems in other branches of physics, neutron physics, condensed matter physics, physics and engineering at low temperatures, physics and engineering of accelerators, physical experimental instruments and methods, physical computation experiments, applied research in these branches of physics and radiology, ecology and nuclear medicine.