{"title":"获取倾斜物体 X 射线图像的光学系统建模","authors":"A. S. Busarov, N. L. Popov","doi":"10.3103/S1068335624600670","DOIUrl":null,"url":null,"abstract":"<p>The paper discusses an optical layout for obtaining reduced X-ray oblique images, which can be useful for X-ray lithography problems. A special feature of the layout is the ability to illuminate the photomask at small grazing angles while recording images with minimal distortion. Using numerical simulations carried out for an X-ray laser with an operating wavelength of 13.9 nm, the spatial resolution and field of view of this system are found.</p>","PeriodicalId":503,"journal":{"name":"Bulletin of the Lebedev Physics Institute","volume":"51 7","pages":"244 - 249"},"PeriodicalIF":0.6000,"publicationDate":"2024-08-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Modeling of Optical Systems for Obtaining X-Ray Images of Inclined Objects\",\"authors\":\"A. S. Busarov, N. L. Popov\",\"doi\":\"10.3103/S1068335624600670\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>The paper discusses an optical layout for obtaining reduced X-ray oblique images, which can be useful for X-ray lithography problems. A special feature of the layout is the ability to illuminate the photomask at small grazing angles while recording images with minimal distortion. Using numerical simulations carried out for an X-ray laser with an operating wavelength of 13.9 nm, the spatial resolution and field of view of this system are found.</p>\",\"PeriodicalId\":503,\"journal\":{\"name\":\"Bulletin of the Lebedev Physics Institute\",\"volume\":\"51 7\",\"pages\":\"244 - 249\"},\"PeriodicalIF\":0.6000,\"publicationDate\":\"2024-08-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Bulletin of the Lebedev Physics Institute\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://link.springer.com/article/10.3103/S1068335624600670\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Bulletin of the Lebedev Physics Institute","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.3103/S1068335624600670","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
摘要
摘要 本文讨论了一种用于获取缩小的 X 射线斜面图像的光学布局，它可用于解决 X 射线光刻问题。该布局的一个特点是能够以较小的掠射角照射光掩膜，同时以最小的失真记录图像。通过对工作波长为 13.9 纳米的 X 射线激光器进行数值模拟，可以发现该系统的空间分辨率和视场。
Modeling of Optical Systems for Obtaining X-Ray Images of Inclined Objects
The paper discusses an optical layout for obtaining reduced X-ray oblique images, which can be useful for X-ray lithography problems. A special feature of the layout is the ability to illuminate the photomask at small grazing angles while recording images with minimal distortion. Using numerical simulations carried out for an X-ray laser with an operating wavelength of 13.9 nm, the spatial resolution and field of view of this system are found.
期刊介绍：
Bulletin of the Lebedev Physics Institute is an international peer reviewed journal that publishes results of new original experimental and theoretical studies on all topics of physics: theoretical physics; atomic and molecular physics; nuclear physics; optics; lasers; condensed matter; physics of solids; biophysics, and others.
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